Polymer coated capacitive microintegrated gas sensor

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 2, Issue , 1995, Pages 814-817

  Steiner, F P ^a   Hierlemann, A ^a   Cornila, C ^a   Noetzel, G ^a   Bachtold, M ^a   Korvink, J G ^a   Gopel, W ^a   Baltes, H ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ANALOG TO DIGITAL CONVERSION; CAPACITANCE MEASUREMENT; CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; POLYURETHANES; SIGNAL TO NOISE RATIO; VOLATILE ORGANIC COMPOUNDS;

GAS POLYMER INTERACTION; MICROFOCUS MEASUREMENT CYPLAN; READ OUT ELECTRONICS;

CHEMICAL SENSORS;

EID: 0029547778     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)