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Volumn , Issue , 1996, Pages 117-122
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Test structures to measure the Seebeck coefficient of CMOS IC polysilicon
a
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Author keywords
[No Author keywords available]
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Indexed keywords
CMOS INTEGRATED CIRCUITS;
ELECTRIC CONTACTS;
INTEGRATED CIRCUIT MANUFACTURE;
MICROELECTROMECHANICAL DEVICES;
MICROMACHINING;
OPTIMIZATION;
SEMICONDUCTING SILICON;
SEMICONDUCTOR DEVICE STRUCTURES;
THERMAL EFFECTS;
THERMAL GRADIENTS;
THERMAL VARIABLES MEASUREMENT;
THIN FILMS;
INTEGRATED THERMAL MICROTRANSDUCERS;
POLYSILICON;
SEEBECK COEFFICIENT;
TEST STRUCTURES;
TRANSDUCERS;
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EID: 0029703532
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (13)
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References (6)
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