Ultrasound barrier microsystem for object detection based on micromachined transducer elements

Journal of Microelectromechanical Systems

Volumn 6, Issue 2, 1997, Pages 151-160

  Brand, Oliver ^b,c,e   Hornung, Mark ^b,e   Baltes, Henry ^a,b   Hafner, Claude ^d,f,g,h  

^a IEEE

^b ETH ZURICH   (Switzerland)

^c GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^d Baumer Electric AG   (Switzerland)

^e UNIVERSITY OF KARLSRUHE   (Germany)

^f Sch of Eng of Winterthur HTL   (Switzerland)

^g R and D Department

^h Ultrasound Sensor Division

Author keywords

Electrothermal actuation; Membrane resonator; Object detection; Packaged microsystem; Resonators; Ultrasound transducer

Indexed keywords

ENCAPSULATION; FABRICATION; MEMBRANES; MICROMACHINING; PERFORMANCE; RESONATORS; ULTRASONIC MEASUREMENT; ULTRASONIC TRANSDUCERS;

MEMBRANE RESONATORS;

OPTICAL SENSORS;

EID: 0031163577     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.585793     Document Type: Article

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