CMOS MEMS nose - fact or fiction?

IEEE International Symposium on Industrial Electronics

Volumn 1, Issue , 1997, Pages

  Baltes, Henry ^a   Koll, Andreas ^a   Lange, Dirk ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CALORIMETRY; CMOS INTEGRATED CIRCUITS; HYDROCARBONS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING;

ELECTRONIC NOSE; MICROSENSORS; OLFACTORY ELECTRONIC SYSTEMS;

CHEMICAL SENSORS;

EID: 0345815502     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)