Coupled 3D thermo-electro-mechanical simulations of microactuators

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 133-138

  Funk, J ^a   Korvink, J G ^a   Bachtold, M ^a   Buhler, J ^a   Baltes, H ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; BOUNDARY CONDITIONS; COMPUTER SIMULATION; ELECTRIC CONDUCTIVITY; ELECTROSTATICS; MICROELECTROMECHANICAL DEVICES; OPTIMIZATION; THERMAL CONDUCTIVITY; THERMAL EFFECTS;

COUPLED THREE DIMENSIONAL THERMO-ELECTRO-MECHANICAL SIMULATION; ELECTRO-THERMAL ACTUATOR; ELECTROSTATIC FORCES; MICROACTUATORS;

ACTUATORS;

EID: 0029755545     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)