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Volumn , Issue , 1996, Pages 133-138
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Coupled 3D thermo-electro-mechanical simulations of microactuators
a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ALGORITHMS;
BOUNDARY CONDITIONS;
COMPUTER SIMULATION;
ELECTRIC CONDUCTIVITY;
ELECTROSTATICS;
MICROELECTROMECHANICAL DEVICES;
OPTIMIZATION;
THERMAL CONDUCTIVITY;
THERMAL EFFECTS;
COUPLED THREE DIMENSIONAL THERMO-ELECTRO-MECHANICAL SIMULATION;
ELECTRO-THERMAL ACTUATOR;
ELECTROSTATIC FORCES;
MICROACTUATORS;
ACTUATORS;
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EID: 0029755545
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (11)
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References (13)
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