Damage profiles in high-energy As implanted Si

Journal of Applied Physics

Volumn 88, Issue 7, 2000, Pages 3993-3999

  Lulli, G ^a   Bianconi, M ^a   Parisini, A ^a   Sama, S ^a   Servidori, M ^a  

^a CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001083737     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1290712     Document Type: Article

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