Binary collision approximation modeling of ion-induced damage effects in crystalline 6H-SiC

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 148, Issue 1-4, 1999, Pages 573-577

  Lulli, G ^a   Albertazzi, E ^a   Bianconi, M ^a   Nipoti, R ^a  

^a CNR   (Italy)

Author keywords

Ion implantation; Monte Carlo simulation; Radiation damage; Silicon carbide

Indexed keywords

ALUMINUM; APPROXIMATION THEORY; COMPUTER SIMULATION; COMPUTER SOFTWARE; CRYSTAL ATOMIC STRUCTURE; CRYSTALLINE MATERIALS; ION IMPLANTATION; MONTE CARLO METHODS; RADIATION DAMAGE; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON CARBIDE; SWELLING;

ION CHANNELING; LINEAR CASCADE APPROXIMATION;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 0033513940     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00698-3     Document Type: Article

References (17)

1. A. Addamiano, G.W. Anderson, J. Comas, H.L. Hughes, W. Lucke, J. Electrochem. Soc. 119 (1972) 1355.
2. M.V. Rao, J.A. Gardner, P.H. Chi, O.W. Holland, G. Kelner, J. Kretchmer, M. Ghezzo, J. Appl. Phys. 81 (1997) 6635.
3. T. Kimoto, T. Nakajima, H. Matsunami, T. Nakata, M. Inoue, Appl. Phys. Lett. 69 (1996) 1113.
4. A. Edwards, D.N. Dwight, M.V. Rao, M.C. Ridgway, G. Kelner, N. Papanicolau, J. Appl. Phys. 82 (1997) 4223.
5. S. Ahmed, C.J. Barbero, T.W. Sigmon, J.W. Ericson, J. Appl. Phys. 77 (1995) 6194.
6. E. Albertazzi, G. Lulli, Nucl. Instr. and Meth. B 120 (1996) 147.
7. E. Morvan, P. Godignon, J. Montserrat, J.F. Fèrnandez, D. Flores, J. Millàn, J.P. Chante, Mat. Sci. Eng. B 46 (1997) 218.
8. J.F. Ziegler, J.P. Biersack, U. Littmark, The Stopping and Range of Ions in Solids, Pergamon Press, New York, 1985.
9. R. Nipoti, E. Albertazzi, M. Bianconi, R. Lotti, G. Lulli, M. Cervera, A. Camera, Appl. Phys. Lett. 70 (1997) 3425.
10. M. Bianconi, G. Lulli, F. Spallacci, E. Albertazzi, R. Nipoti, A. Camera, C. Cellini, Nucl. Instr. and Meth. B 122 (1997) 689.
11. E. Bogh, Can. J. Phys. 46 (1968) 653.
12. N. Mestres, M. Ben El Mekki, F.J. Campos, J. Pascual, E. Morvan, P. Godignon, J. Millan, G. Lulli, Mat. Sci. Forum 264/268 (1998) 733.
13. J. Wong, T. Diaz de la Rubia, M.W. Guinan, M. Tobin, J.M. Perlado, A.S. Perez, J. Sanz, J. Nucl. Mater. 212-215 (1994) 143.
14. A. El-Azab, N.M. Ghoniem, J. Nucl. Mater. 191-194 (1992) 1110.
15. I.A. Hønstvet, R.E. Smallman, P.M. Marquis, Phil. Mag. A 41 (1980) 201.
16. H. Inui, H. Mori, H. Fujita, Phil. Mag. B 61 (1990) 107.
17. A.L. Barry, B. Lehmann, D. Fritsch, D. Bräunig, IEEE Trans. Nucl. Sci. 38 (1991) 1111.