Stopping and damage parameters for Monte Carlo simulation of MeV implants in crystalline Si

Journal of Applied Physics

Volumn 82, Issue 12, 1997, Pages 5958-5964

  Lulli, G ^a   Albertazzi, E ^a   Bianconi, M ^a   Nipoti, R ^a   Cervera, M ^a,c   Carnera, A ^b   Cellini, C ^b  

^a CNR   (Italy)

^b UNIVERSITY OF PADOVA   (Italy)

^c UNIVERSIDAD AUTÓNOMA DE MADRID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001669491     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.366498     Document Type: Article

References (46)

1. D. Pramanik and M. I. Current, Solid State Technol. 27, 211 (1984).
2. J. F. Ziegler, Nucl. Instrum. Methods Phys. Res. B 6, 270 (1985).
3. K. Tsukamoto, T. Kuroi, S. Komori, and Y. Akasaka, Solid State Technol. 35, 49 (1992).
4. J. O. Borland and R. Koelsch, Solid State Technol. 36, 28 (1993).
5. J. O. Borland and T. E. Seidel, Solid State Technol. 39, 89 (1966).
6. H. Wong, E. Deng, N. W. Cheung, P. K. Chu, E. M. Stratham, and M. D. Strathman, Nucl. Instrum. Methods Phys. Res. B 21, 447 (1987).
7. V. Scüle, R. Günzler, P. Oberschachtsiek, M. Weiser, and S. Kalbitzer, Nucl. Instrum. Methods Phys. Res. B 62, 338 (1992).
8. S. Bogen, L. Gong, L. Frey, and H. Ryssel, Nucl. Instrum. Methods Phys. Res. B 80/81, 659 (1993).
9. V. Raineri, A. Cacciato, F. Benyaïc, F. Priolo, E. Rimini, G. Galvagno, and S. Capizzi, Nucl. Instrum. Methods Phys. Res. B 62, 331 (1992).
10. G. Galvagno, V. Raineri, R. Setola, F. Priolo, and E. Rimini, Nucl. Instrum. Methods Phys. Res. B 67, 476 (1992).
11. M. Tamura and T. Suzuki, Nucl. Instrum. Methods Phys. Res. B 39, 318 (1989).
12. L. Gong, S. Bogen, L. Frey, W. Jung, and H. Ryssel, Microelectron. Eng. 19, 495 (1992).
13. C. H. Murthy and G. R. Srinivasan, IEEE Trans. Electron Devices 39, 264 (1992).
14. K. M. Klein, C. Park, and A. F. Tasch, IEEE Trans. Electron Devices 39, 1614 (1992).
15. G. Hobler and H. Pötzl, Mater. Res. Soc. Symp. Proc. 279, 165 (1993).
16. G. Hobler, Nucl. Instrum. Methods Phys. Res. B 96, 155 (1995).
17. A. Simionescu, S. Herzog, G. Hobler, R. Schork, J. Lorentz, C. Tian, and G. Stingeder, Nucl. Instrum. Methods Phys. Res. B 100, 483 (1995).
18. A. Simionescu, G. Hobler, S. Bogen, L. Frey, and H. Ryssel, Nucl. Instrum. Methods Phys. Res. B 106, 47 (1995).
19. E. Albertazzi, M. Bianconi, G. Lulli, R. Nipoti, and M. Cantiano, Nucl. Instrum. Methods Phys. Res. B 118, 128 (1996).
20. E. Albertazzi, M. Bianconi, G. Lulli, R. Nipoti, A. Carnera, and C. Cellini, Nucl. Instrum. Methods Phys. Res. B 112, 152 (1996).
21. A. Desalvo, R. Rosa, and F. Zignani, Radiat. Eff. 27, 89 (1975).
22. A. Mazzone, Nucl. Instrum. Methods Phys. Res. B 34, 22 (1988).
23. M. T. Robinson and I. M. Torrens, Phys. Rev. B 9, 5008 (1974).
24. J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, New York, 1985).
25. B. Yuan, F. C. Yu, and S. M. Tang, Nucl. Instrum. Methods Phys. Res. B 83, 413 (1993).
26. O. S. Oen and M. T. Robinson, Nucl. Instrum. Methods 132, 647 (1976).
27. E. H. A. Dekempeneer, P. C. Zalm, G. Van Hoften, and J. Politiek, Nucl. Instrum. Methods Phys. Res. B 48, 224 (1990).
28. M. Posselt, Nucl. Instrum. Methods Phys. Res. B 80/81, 28 (1993).
29. J. Lindhard, Mat. Fys. Medd. K. Dan. Vidensk. Selsk. 28, 8 (1954).
30. G. H. Kinchin and R. S. Pease, Rep. Prog. Phys. 18, 1 (1955).
31. M. T. Robinson, Philos. Mag. 12, 741 (1965).
32. P. Sigmund, Appl. Phys. Lett. 14, 114 (1969).
33. M. J. Norgett, M. T. Robinson, and I. M. Torrens, Nucl. Eng. Design 33, 50 (1975).
34. K. B. Winterbon, P. Sigmund, and J. B. Sanders, Mat. Fys. Medd. K. Dan. Vidensk. Selsk. 37, 14 (1963).
35. J. P. Biersack, and L. G. Haggmark, Nucl. Instrum. Methods 174, 257 (1980).
36. G. Bai, and M. Nicolet, J. Appl. Phys. 70, 3551 (1991).
37. R. Nipoti, G. Lulli, S. Milita, M. Servidori, C. Cellini, and A. Carnera, Nucl. Instrum. Methods Phys. Res. B 112, 148 (1996).
38. M. J. Caturla, T. Diaz de la Rubia, L. A. Marques, and G. H. Gilmer, Phys. Rev. B 54, 16 683 (1996).
39. T. Diaz de la Rubia and G. H. Gilmer, Phys. Rev. Lett. 74, 2507 (1995).
40. D. A. Thompson and R. S. Walker, Radiat. Eff. 36, 98 (1978).
41. R. Benedek, J. Appl. Phys. 52, 5557 (1981).
42. R. Dierckx, J. Nucl. Mater. 144, 214 (1987).
43. R. S. Averback, R. Benedek, and K. L. Merkle, Phys. Rev. B 18, 4156 (1978).
44. T. Diaz de la Rubia, Nucl. Instrum. Methods Phys. Res. B 120, 19 (1996).
45. D. A. Thompson, Radiat. Eff. 56, 105 (1981).
46. F. Rossi, D. M. Parkin, and M. Nastasi, J. Mater. Res. 4, 137 (1989).