Determination of He electronic energy loss in crystalline Si by Monte-Carlo simulation of Rutherford backscattering-channeling spectra

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 170, Issue 1, 2000, Pages 1-9

  Lulli, G ^a   Albertazzi, E ^a   Bianconi, M ^a   Bentini, G G ^a   Nipoti, R ^a   Lotti, R ^a  

^a CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; CRYSTALLINE MATERIALS; ELECTRONS; ENERGY DISSIPATION; HELIUM; MONTE CARLO METHODS; SILICON; SILICON WAFERS;

BINARY COLLISION; CHANNELING; ELECTRONIC ENERGY LOSS; SEMIEMPIRICAL MODEL; VALENCE ELECTRONS;

RUTHERFORD BACKSCATTERING SPECTROSCOPY;

EID: 0034275559     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(00)00089-6     Document Type: Article

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