RBS-channeling analysis of virgin 6H-SiC: Experiments and Monte Carlo simulations

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 136-138, Issue , 1998, Pages 1267-1271

  Bianconi, M ^a   Albertazzi, E ^a   Carnera, A ^b   Lulli, G ^a   Nipoti, R ^a   Sambo, A ^b  

^a CNR   (Italy)

^b UNIVERSITY OF PADOVA   (Italy)

Author keywords

Monte Carlo; RBS channeling; SiC

Indexed keywords

COMPUTER SIMULATION; COMPUTER SOFTWARE; CRYSTAL GROWTH; CRYSTALLINE MATERIALS; MONTE CARLO METHODS; RUTHERFORD BACKSCATTERING SPECTROSCOPY;

RUTHERFORD BACKSCATTERING SPECTROMETRY CHANNELING ANALYSIS;

SILICON CARBIDE;

EID: 0032020879     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00840-4     Document Type: Article

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