Analysis of silicon oxynitrides with spectroscopic ellipsometry and Auger spectroscopy, compared to analyses by Rutherford backscattering spectrometry and Fourier transform infrared spectroscopy

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 2, 1999, Pages 391-397

  Tompkins, Harland G ^a   Gregory, Richard B ^a   Deal, Paul W ^a   Smith, Steven M ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033415227     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582030     Document Type: Article

References (24)

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