Structural optimization of a large-displacement electromagnetic Lorentz force microactuator for optical switching applications

Journal of Micromechanics and Microengineering

Volumn 14, Issue 11, 2004, Pages 1585-1596

  Han, Jeong Sam ^a   Ko, Jong Soo ^b   Korvink, Jan G ^b  

^a UNIVERSITY OF FREIBURG   (Germany)

^b Pusan National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BUCKLING; ELECTROMAGNETISM; FREQUENCIES; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; SILICON; STRESS ANALYSIS; STRUCTURAL OPTIMIZATION; SURFACES;

ELECTROMAGNETIC MICROACTUATORS; LEAF SPRINGS; MICROELECTROMECHANICAL SYSTEMS (MEMS); OPTICAL SWITCHING;

OPTICAL SWITCHES;

EID: 9644290779     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/11/021     Document Type: Article

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