A DC-powered, tunable, fully mechanical oscillator using in-plane electrothermal actuation

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 502-505

  Udeshi, Kabir ^a,b   Gianchandani, Yogesh B ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b NONE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DC POWER SOURCES; MECHANICAL MICROMACHINED OSCILLATORS; MODELING; POWER CONSUMPTION;

ACCELEROMETERS; AMPLIFICATION; BIFURCATION (MATHEMATICS); ELECTROPLATING; ENERGY UTILIZATION; FEEDBACK; GYROSCOPES; MATHEMATICAL MODELS; MICROMACHINING; OSCILLATORS (ELECTRONIC); VOLTAGE CONTROL;

ACTUATORS;

EID: 3042780031     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2003.1189796     Document Type: Conference Paper

References (10)

1. D. Burns, J. Zook, R. Horning, W. Herb, H. Guckel, "Sealed-cavity resonant microbeam pressure sensor," Sensors and Actuators, A: Physical, v 48, n 3, May 30, 1995, p 179-86
2. T. Roessig, R. Howe, A. Pisano, J. Smith, "Surface-micromachined resonant accelerometer," International Conference on Solid-State Sensors & Actuators, Proc., v 2,1997, p 859-62
3. M. Putty, K. Najafi, "A micromachined vibrating ring gyroscope," Solid State Sensor & Act. Workshop, 1994, p 213-20
4. C. Nguyen, "High-Q micromechanical oscillators and filters for communications," 1997 IEEE International Symposium on Circuits and Systems, 1997, p 2825-28
5. A. Dec, K. Suyama, "Microwave MEMS-based voltage-controlled oscillators," IEEE Transactions on Microwave Theory and Techniques, v 48, n 11, Nov 2000, p 1943-49
6. L. Que, J. Park, Y. Gianchandani, "Bent-Beam Electro-Thermal Actuators for High Force Applications," IEEE International MEMS, 1999, p 31-36
7. B. Jensen, M, Parkinson, K. Kurabayashi, L. Howell, M. Baker, "Design Optimization of a Fully-Compliant Bistable Micro-Mechanism," ASME International Mechanical Engineering Congress and Exposition, 2001, p 357-63
8. L. Chu, Feedback controllable ID and 2D Micro Positioners using Electrothermal Actuators and Capacitive Displacement Sensors, Ph.D. dissertation, Univ. of Wisconsin-Madison, 2003
9. H. Lorents, M. Despont, N. Fahrni, N. LaBianaca, P. Renaud, P. Vettiger, "SU-8: a low-cost negative resist for MEMS," J. Micromech. Microeng 7, 1997, p 121-24
10. J. Park, L. Chu, E. Siwapornsathain, A. Oliver, Y. Gianchandani, "Long throw and rotary output electro-thermal actuators based on bent-beam suspensions," Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 2000, p 680-85