Global optimization and design for microelectromechanical systems devices based on simulated annealing

Journal of Micromechanics and Microengineering

Volumn 12, Issue 6, 2002, Pages 878-897

  Ongkodjojo, Andojo ^a   Tay, Francis E H ^a,b  

^a INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; BOUNDARY ELEMENT METHOD; COMPUTER SIMULATION; FINITE ELEMENT METHOD; GLOBAL OPTIMIZATION; GYROSCOPES; ITERATIVE METHODS; SIMULATED ANNEALING;

MICROGYROSCOPE; SOFTWARE PACKAGE EXCEL SOLVER; SOFTWARE PACKAGE INTELLISUITE;

MICROELECTROMECHANICAL DEVICES;

EID: 0036851102     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/12/6/320     Document Type: Article

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