Design, optimization, and experiments of compliant microgripper

American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)

Volumn 5, Issue , 2003, Pages 345-350

  Oh, Young Seok ^a   Lee, Woo Ho ^a   Stephanou, Harry E ^a   Skidmore, George D ^b  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

^b ZYVEX CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COSTS; FINITE ELEMENT METHOD; GRIPPERS; INTEGRATION; MICROSTRUCTURE; OPTIMIZATION; REACTIVE ION ETCHING; SILICON ON INSULATOR TECHNOLOGY; STIFFNESS; TOPOLOGY;

MICROASSEMBLY; MICROGRIPPERS;

MICROELECTROMECHANICAL DEVICES;

EID: 1942488177     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/imece2003-55013     Document Type: Conference Paper

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