Planar latch-up microactuator driven by thermoelastic force

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4176, Issue , 2000, Pages 264-271

  Lee, Jong Hyun ^a   Lee, Myung Lae ^a   Jang, Won Ick ^a   Choi, Chang Auck ^a   Kim, Youn Tae ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POTENTIAL; FLIP FLOP CIRCUITS; MIRRORS; OPTICAL SWITCHES; POLYCRYSTALLINE MATERIALS; SILICON; SUBSTRATES; THERMOELASTICITY;

PLANAR LATCH-UP MICROACTUATORS;

MICROACTUATORS;

EID: 0034548395     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.395638     Document Type: Conference Paper

References (10)