Laterally moving BI-stable mems DC-switch for biomedical applications

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 854-856

  Receveur, R A M ^a   Marxer, C ^b   Duport, F ^b   Woering, R ^a   Larik, V ^a   De Rooij, N F ^b  

^a MEDTRONIC BAKKEN RESEARCH CENTER   (Netherlands)

^b UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMEDICAL ENGINEERING; CIRCUIT RESONANCE; CONSUMER ELECTRONICS; DC MACHINERY; ELECTRIC RESISTANCE; ELECTRODES; ELECTROSTATIC ACTUATORS; PRODUCT DESIGN; PULSE GENERATORS; SILICON SENSORS;

BIO-STABLE SWITCHES; BIOMEDICAL APPLICATIONS; ELECTROMECHANICAL SWITCHES; IMPLANTABLE PULSE GENERATORS (IPG);

SWITCHES;

EID: 3042745235     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. F. Gueissaz and D. Piguet, Proc. MEMS 2001, pp. 269-273
2. E. J. J. Kruglick and K. S. J. Pister, J. Microelectromech. Syst., 8 (1999), pp. 264-271.
3. R.L. Berwick III, P.A. Stupar and J. DeNatale, Proc. Transducers 2003, pp. 859-862
4. B.Hichwa etal, Optical MEMS conference, Kauai, Hawaii, USA, August 21-24th 2000. (Post deadline paper)