Optimum design of a MEMS switch

2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002

Volumn , Issue , 2002, Pages 214-217

  Brenner, Michael P ^a   Lang, Jeffrey H ^b   Li, Jian ^c   Qiu, Jin ^c   Slocum, Alexander H ^c  

^a HARVARD UNIVERSITY   (United States)

^b USA   (United States)

^c Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

MEMS; Optimization; Switch

Indexed keywords

CROSS SECTION; DESIGN PARAMETERS; FORCE DISPLACEMENT; SWITCH;

ALGORITHMS; CANTILEVER BEAMS; COMPUTATIONAL COMPLEXITY; CONSTRAINT THEORY; EIGENVALUES AND EIGENFUNCTIONS; ELASTIC MODULI; FINITE ELEMENT METHOD; FUNCTION EVALUATION; OPTIMIZATION; STRAIN;

MICROELECTROMECHANICAL DEVICES;

EID: 6344249415     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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