Development of miniaturized piezoelectric actuators for optical applications realized using LIGA technology

Journal of Microelectromechanical Systems

Volumn 8, Issue 3, 1999, Pages 258-263

  Debéda, Hélène ^a   Freyhold, Thilo V ^b   Mohr, Jürgen ^c   Wallrabe, Ulrike ^c   Wengelink, Jörg ^c  

^a UNIVERSITÉ DE BORDEAUX   (France)

^b FRAUNHOFER GESELLSCHAFT   (Germany)

^c KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHOPPERS (CIRCUITS); ELECTRIC ATTENUATORS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC DEVICES; X RAY LITHOGRAPHY;

MICROOPTICAL ATTENUATORS;

MICROACTUATORS;

EID: 0032594989     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.788629     Document Type: Article

References (10)

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10. T. v. Freyhold et al., "Miniaturized piezo electric chopper for fiber optical multimode applications realized using LIGA-technology," in Optical MEMS'98, IEEE/LEOS Summer Topical Meetings, Monterey, CA, July 1998, pp. 75-76.