Texture etched ZnO:Al for silicon thin film solar cells

Springer Series in Materials Science

Volumn 104, Issue , 2008, Pages 359-413

  Hupkes J ^a   Muller J ^a   Rech, B ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

Maximum power point; Short circuit current density; Silicon solar cell; Solar cell; Solar module

Indexed keywords

EID: 85072842413     PISSN: 0933033X     EISSN: 21962812     Source Type: Book Series    
DOI: 10.1007/978-3-540-73612-7_8     Document Type: Chapter

References (161)

1. M. Zeman, R.E.I. Schropp, Amorphous and Microcrystal line Silicon Solar Cells (Kluwer, Norwell, 1998)
2. B. Rech, H. Wagner, Appl. Phys. A 69, 155 (1999)
3. J.K. Rath, Sol. Energ. Mater. Sol. Cell. 76, 431 (2003)
4. J. Müller, G. Schöpe, O. Kluth, B. Rech, V. Sittinger, B. Szyszka, R. Geyer, P. Lechner, H. Schade, M. Ruske, G. Dittmar, H.P. Bochem, Thin Solid Films 442, 158 (2003)
5. J. Yang, B. Yan, S. Guha, Thin Solid Films 487, 162 (2005)
6. R. Schlatmann, B. Stannowski, E.A.G. Hamers, J.M. Lenssen, A.G. Talma, G.C. Dubbeldam, G.J. Jongerden, in Technical Digest of the 15th International Photovoltaic Science and Engineering Conference, Shanghai, China, 2005, p. 744
7. A. Madan, Surf. Coat. Technol. 200, 1907 (2005)
8. A. Shah, H. Schade, M. Vanecek, J. Meier, E. Vallat-Sauvain, N. Wyrsch, U. Kroll, C. Droz, J. Bailat, Prog. Photovolt. Res. Appl. 12, 113 (2004)
9. R.W. Miles, Vacuum 80, 1090 (2006)
10. J.M. Woodcock, H. Schade, H. Maurus, B. Dimmler, J. Springer, A. Ricaud, in Proceedings of the 14th European Photovoltaic Solar Energy Conference, Barcelona, Spain, 1997, p. 857
11. M.S. Keshner, R.R. Arya, in Technical Digest of the 15th International Photovoltaic Science and Engineering Conference, Shanghai, China, 2005, p. 149
12. J. Morris, R.R. Arya, J.G. ODowd, D. Wiedemann, J. Appl. Phys. 67, 1079 (1990)
13. C. Beneking, B. Rech, T. Eickhoff, Y.G. Michael, N. Schultz, H. Wagner, in Proceedings of the 12th European Photovoltaic Solar Energy Conference, Amsterdam, The Netherlands, 1994, p. 683
14. D. Fischer, S. Dubail, J.A. Anna Selvan, N. Pellaton Vaucher, R. Platz, C. Hof, U. Kroll, J. Meier, P. Torres, H. Keppner, N. Wyrsch, M. Goetz, A. Shah, K.D. Ufert, in Proceedings of the 25th IEEE Photovoltaic Specialists Conference, Washington DC, USA, 1996, p. 1053
15. N. Pellaton Vaucher, J.L. Nagel, R. Platz, D. Fischer, A. Shah, in Proceedings of the 2nd World Conference on Photovoltaic Solar Energy Conversion, Vienna, Austria, 1998, p. 728
16. K. Yamamoto, A. Nakajima, M. Yoshimi, T. Sawada, S. Fukuda, T. Suezaki, M. Ichikawa, Y. Koi, M. Goto, T. Meguro, T. Matsuda, M. Kondo, T. Sasaki, Y. Tawada, Sol. Energy 77, 939 (2004)
17. J. Müller, B. Rech, J. Springer, M. Vanecek, Sol. Energy 77, 917 (2004)
18. D.L. Staebler, C.R. Wronski, Appl. Phys. Lett. 31, 292 (1977)
19. J. Müller, G. Schöpe, B. Rech, H. Schade, P. Lechner, R. Geyer, H. Stiebig, W. Reetz, in Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion (WCPEC-3), Osaka, Japan, 2003, p. 1839
20. T. Minami, H. Sato, H. Nanto, S. Takata, Thin Solid Films 176, 277 (1989)
21. O. Vetterl, F. Finger, R. Carius, P. Hapke, L. Houben, O. Kluth, A. Lambertz, A. Mück, B. Rech, H. Wagner, Sol. Energ. Mater. 62, 97 (2000)
22. J. Meier, E. Vallat-Sauvain, S. Dubail, U. Kroll, J. Dubail, S. Golay, L. Feitknecht, P. Torres, S. Faÿ, D. Fischer, A. Shah, Sol. Energ. Mater. 66, 73 (2001)
23. C. Beneking, W.A. Nositschka, O. Kluth, G. Schöpe, F. Birmans, H. Siekmann, B. Rech, in Proceedings of the 16th European Photovoltaic Solar Energy Conference, vol. II, Glasgow, UK, 2000, p. 1230
24. K.V. Maydell, H. Windgassen, W.A. Nositschka, U. Rau, P.J. Rostan, J. Henze, J. Schmidt, M. Scherff, W. Fahrner, D. Borchert, S. Tordon, H. Stiebig, M. Schmidt, in Proceedings of the 20th European Photovoltaic Solar Energy Conference, Barcelona, Spain, 2005, p. 822
25. R.A. Street, Hydrogenated Amorphous Silicon, (Cambridge University Press, Cambridge, 1991)
26. R.A. Street, Technology and Applications of Amorphous Silicon (Springer, Berlin Heidelberg New York, 2000)
27. H. Overhof, P. Thomas, Electronic Transport in Hydrogenated Amorphous Semiconductors (Springer, Berlin Heidelberg New York, 1989)
28. B. Rech, T. Roschek, J. Müller, S. Wieder, H. Wagner, Sol. Energ. Mater. Sol. Cell. 66, 267 (2001)
29. H. Keppner, J. Meier, P. Torres, D. Fischer, A. Shah, Appl. Phys. A 69, 169 (1999)
30. S. Klein, F. Finger, R. Carius, H. Stiebig, in Proceedings of the 19th European Photovoltaic Solar Energy Conference, Paris, France, 2004, p. 1579
31. F. Meillaud, E. Vallat-Sauvain, X. Niquille, M. Dubey, J. Bailat, A. Shah, C. Ballif, in Proceedings of the 31st IEEE Photovoltaic Specialists Conference, Orlando, USA, 2005, p. 1412
32. R. Carius, Photovoltaic and Photoactive Materials – Properties, Technology and Applications (Kluwer, Dordrecht, 2002), p. 93
33. J. Springer, A. Poruba, L. Mullerova, M. Vanecek, O. Kluth, B. Rech, J. Appl. Phys. 95, 1427 (2004)
34. Y. Ichikawa, T. Yoshida, T. Hama, H. Sakai, K. Harashima, Sol. Energ. Mater. Sol. Cell. 66, 107 (2001)
35. R.E.I. Schropp, E. Middelman, E. van Andel, H. Meiling, C.H.M. van der Werf, P.M.G.M. Peters, L.V. de Jonge-Meschaninova, J. Winkeler, R.J. Severens, M. Zeman, M.C.M. van de Sanden, A. Kuipers, C.I.M.A. Spee, G.J. Jongerden, in Proceedings of the 2nd World Conference on Photovoltaic Solar Energy Conversion, Wien, Austria, 1998, p. 820
36. M.N. van den Donker, T. Repmann, H. Stiebig, F. Finger, B. Rech, B. Stannowski, R. Schlatmann, G.J. Jongerden, in Technical Digest of the 15th International Photovoltaic Science and Engineering Conference, Shanghai, China, 2005, p. 857
37. Y. Uchida, in Proceedings of the 7th European Photovoltaic Solar Energy Conference, Seville, Spain, 1986, p. 395
38. H. Sakai, Y. Ichikawa, J. Non-Cryst. Solids 137–138, 1155 (1991)
39. J. Yang, A. Banerjee, S. Guha, Appl. Phys. Lett. 70, 2975 (1997)
40. G. Nakamura, K. Sato, Y. Yukimoto, in Proceedings of the 16th IEEE Photovoltaic Specialists Conference, New York, USA, 1982, p. 1331
41. Y. Tawada, H. Yamagishi, K. Yamamoto, Sol. Energ. Mater. Sol. Cell. 78, 647 (2003)
42. Sharp develops mass-production technology for triple-junction thin-film solar cells, Press release, January 24, 2007, http://www.sharp-world.com/corporate/news/070124.html. Last check 23 Apr 2007
43. Q-Cells AG, Brilliant den Grundstein gelegt, Press release, October, 11, 2006, http://www.q-cells.com/cmadmin 1 1055 0.html. Last check 23 Apr 2007
44. S. Wieder, M. Liehr, T. Repmann, B. Rech, in Technical Digest of the 15th International Photovoltaic Science and Engineering Conference, Shanghai, China, 2005, p. 145
45. B. Rech, T. Repmann, M.N. van den Donker, M. Berginski, T. Kilper, J. Hüpkes, S. Calnan, H. Stiebig, S. Wieder, Thin Solid Films 511–512, 548 (2006)
46. T. Takagi, M. Ueda, N. Ito, Y. Watabe, H. Sato, K. Sawaya, Thin Solid Films 502, 50 (2006)
47. J. Meier, U. Kroll, T. Roschek, J. Spitznagel, S. Benagli, C. Ellert, G. Androutsopoulos, A. Hügli, W. Stein, J. Springer, O. Kluth, D. Borello, M. Poppeller, G. Büchel, A. Büchel, in Technical Digest of the 15th International Photovoltaic Science and Engineering Conference, Shanghai, China, 2005, p. 238
48. T. Repmann, B. Sehrbrock, C. Zahren, H. Siekmann, J. Hüpkes, B. Rech, W. Psyk, R. Geyer, P. Lechner, in Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion, Osaka, Japan, 2003, p. 1574
49. T. Repmann, J. Kirchhoff, W. Reetz, F. Biermans, J. Müller, B. Rech, in Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion, Osaka, Japan, 2003, p. 1843
50. H. Stiebig, W. Reetz, C. Haase, T. Repmann, B. Rech, in Technical Digest of the 15th International Photovoltaic Science and Engineering Conference, Shanghai, China, 2005, p. 561
51. H. Stiebig, W. Reetz, C. Zahren, T. Repmann, B. Rech, in Proceedings of the 4th World Conference on Photovoltaic Energy Conversion, Waikoloa, USA, 2006, p. 1521
52. W. Beyer, J. Hüpkes, H. Stiebig, Transparent conducting oxide films for thin film silicon photovoltaics. to be published at ICMCTF, San Diego (2007)
53. M. Kubon, E. Böhmer, F. Siebke, B. Rech, C. Beneking, H. Wagner, Sol. Energ. Mater. Sol. Cell. 41–42, 485 (1996)
54. E. Böhmer, F. Siebke, B. Rech, C. Beneking, H. Wagner, Mater. Res. Soc. Symp. Proc. 426, 519 (1996)
55. H. Stiebig, F. Siebke, W. Beyer, C. Beneking, B. Rech, H. Wagner, Sol. Energ. Mater. Sol. Cell. 48, 351 (1997)
56. J. Müller, O. Kluth, S. Wieder, H. Siekmann, G. Schöpe, W. Reetz, O. Vetterl, D. Lundszien, A. Lambertz, F. Finger, B. Rech, H. Wagner, Sol. Energ. Mater. Sol. Cell. 66, 275 (2001)
57. H. Ibach, H. Lüth, Solid State Physics (Springer, Berlin Heidelberg New York, 2003)
58. J. Springer, B. Rech, W. Reetz, J. Müller, M. Vanecek, Sol. Energ. Mater. 85, 1 (2005)
59. H. Stiebig, A. Kresiel, K. Winz, N. Schultz, C. Beneking, T. Eickhoff, H. Wagner, in Proceedings of the 1st World Conference on Photovoltaic Solar Energy Conversion, Waikaloa, USA, 1994, p. 603
60. F. Leblanc, J. Perrin, J. Schmitt, J. Appl. Phys. 75, 1074 (1994)
61. Y. Hishikawa, T. Kinoshita, M. Shima, M. Tanaka, S. Kiyama, S. Tsuda, S. Nakano, in Proceedings of the 26th IEEE Photovoltaic Specialists Conference, Anaheim, USA, 1997, p. 615
62. Y. Hishikawa, H. Tari, S. Kiyama, Technical Digest of the 11th International Photovoltaic Science and Engineering Conference, Sapporo, Japan, 1999, p. 219
63. M. Zeman, R.A.C.M.M. van Swaaij, J.W. Metselaar, R.E.I. Schropp, J. Appl. Phys. 88, 6436 (2000)
64. J. Krč, M. Zeman, F. Smole, M. Topič, J. Appl. Phys. 92, 749 (2002)
65. J. Springer, B. Rech, T. Repmann, H. Siekmann, W. Reetz, J. Müller, M. Ruske, M. Vanecek, in Proceedings of the 17th European Photovoltaic Solar Energy Conference, München, Germany, 2002, p. 2869
66. H. Stiebig, M. Schulte, C. Zahren, C.S. Haase, B. Rech, P. Lechner, in Proceedings of the Photonics Europe – Photonics for Solar Energy Systems, Vol. 6197, Strasbourg, France, 2006, p. 1
67. C. Haase, H. Stiebig, Prog. Photovolt. Res. Appl. 14, 629 (2006)
68. P.A. Basore, in Proceedings of the 29th IEEE Photovoltaic Specialists Conference, New Orleans, USA, 2002, p. 49
69. Y. Gupta, H. Liers, S. Woods, S. Young, R. DeBlasio, L. Mrig, in Proceedings of the 16th IEEE Photovoltaic Specialists Conference, San Diego, USA, 1982, p. 1092
70. C. Beneking, B. Rech, S. Wieder, O. Kluth, H. Wagner, W. Frammelsberger, R. Geyer, P. Lechner, H. Rübel, H. Schade, Thin Solid Films 351, 243 (1999)
71. K. Sato, Y. Gotoh, Y. Wakayama, Y. Hayashi, K. Adachi, H. Nishimura, Reports Res. Lab., Asahi Glass Co. Ltd., 1992
72. P.F. Gerhardinger, R.J. Mccurdy, Mater. Res. Soc. Symp. Proc. 426, 399 (1996)
73. M. Kambe, M. Fukawa, N. Taneda, Y. Yoshikawa, K. Sato, K. Ohki, S. Hiza, A. Yamada, M. Konagai, in Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion, Osaka, Japan, 2003, p. 1812
74. B. Kuhn, D. Le Bellac, B. Rech, J. Hüpkes, G. Schöpe, in Proceedings of the 21st European Photovoltaic Solar Energy Conference, Dresden, Germany, 2006, p. 1733
75. T. Uchino, K. Nakaguchi, Y. Nagashima, T. Kondo, J. Non-Cryst. Solids 261, 72 (2000)
76. M. Hirata, A. Fujisawa, T. Otani, Y. Nagashima, K. Kiyohara, M. Hyodo, in Proceedings of the 3rd International Conference on Coatings on Glass, Maas-tricht, The Netherlands, 2001, p. 395
77. U. Blieske, T. Droege, P. Gayout, M. Neander, D. Neumann, A. Prat, in Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion (WCPEC-3), Osaka, Japan, 2003, p. 188
78. L. Yang, M. Bennett, L. Chen, K. Jansen, J. Kessler, Y. Li, J. Newton, K. Rajan, S. Willing, R. Arya, D. Carlson, Mat. Res. Soc. Symp. Proc. 420, 839 (1996)
79. R. van den Berg, H. Calwer, P. Marklstorfer, R. Meckes, F.W. Schulze, K.D. Ufert, H. Vogt, Sol. Energ. Mater. 31, 253 (1993)
80. S. Faÿ, S. Dubail, U. Kroll, J. Meier, Y. Ziegler, A. Shah, in Proceedings of the 16th European Photovoltaic Solar Energy Conference, Glasgow, UK, 2000, p. 361
81. R. Groenen, J. Loeffler, P.M. Sommeling, J.L. Linden, E.A.G. Hamers, R.E.I. Schropp, M.C.M. van de Sanden, Thin Solid Films 392, 226 (2001)
82. N. Toyama, R. Hayashi, Y. Sonoda, M. Iwata, Y. Miyamoto, H. Otoshi, K. Saito, K. Ogawa, in Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion, Osaka, Japan, 2003, p. 1601
83. N. Senoussaoui, M. Krause, J. Müller, E. Bunte, T. Brammer, H. Stiebig, Thin Solid Films 451–452, 397 (2004)
84. N.P. Harder, D. Le Bellac, E. Royer, B. Rech, G. Schöpe, J. Müller, in Proceedings of the 19th European Photovoltaic Solar Energy Conference, Paris, France, 2004, p. 1355
85. J. Ji, P.A. Basore, R. Evans, International Patent WO 03/019676 A1, 2003
86. T. Nakada, Y. Ohkubo, A. Kunioka, Jpn. J. Appl. Phys. 30, 3344 (1991)
87. H. Sato, T. Minami, S. Takata, T. Mouri, N. Ogawa, Thin Solid Films 220, 327 (1992)
88. J.A. Anna Selvan, H. Keppner, A. Shah, Mater. Res. Soc. Symp. Proc. 426, J9.4 (1996)
89. O. Kluth, Dissertation, Rheinisch-Westfählische Technische Hochschule (1996)
90. A. Löffl, S. Wieder, B. Rech, O. Kluth, C. Beneking, H. Wagner, in Proceedings of the 14th European Photovoltaic Solar Energy Conference, Barcelona, Spain, 1997, p. 2089
91. O. Kluth, A. Löffl, S. Wieder, C. Beneking, W. Appenzeller, L. Houben, B. Rech, H. Wagner, S. Hoffmann, R. Waser, J.A. Anna Selvan, H. Keppner, in Proceedings of the 26th IEEE Photovoltaic Specialists Conference, Anaheim, USA, 1997, p. 715
92. O. Kluth, B. Rech, L. Houben, S. Wieder, G. Schöpe, C. Beneking, H. Wagner, Thin Solid Films 351, 247 (1999)
93. J. Hüpkes, B. Rech, S. Calnan, O. Kluth, U. Zastrow, H. Siekmann, M. Wuttig, Thin Solid Films 502, 286 (2006)
94. B. Rech, S. Wieder, C. Beneking, A. Löffl, O. Kluth, W. Reetz, H. Wagner, in Proceedings of the 26th IEEE Photovoltaic Specialists Conference, Anaheim, USA, 1997, p. 619
95. O. Kluth, O. Vetterl, R. Carius, F. Finger, S. Wieder, B. Rech, H. Wagner, Mater. Res. Soc. Symp. Proc. 557, 731 (1999)
96. O. Kluth, G. Schöpe, J. Hüpkes, C. Agashe, J. Müller, B. Rech, Thin Solid Films 442, 80 (2003)
97. C. Agashe, O. Kluth, J. Hüpkes, U. Zastrow, B. Rech, M. Wuttig, J. Appl. Phys. 95, 1911 (2004)
98. T.J. Coutts, D.L. Young, X. Li, W.P. Mulligan, X. Wu, J. Vac. Sci. Technol. A 18, 2646 (2000)
99. J. Hüpkes, M. Berginski, V. Sittinger, F. Ruske, B. Rech, H. Siekmann, J. Kirchhoff, B. Zwaygardt, in Proceedings of the 21st European Photovoltaic Solar Energy Conference, Dresden, Germany, 2006, p. 1779
100. T. Minami, H. Nanto, S. Takata, Jpn. J. Appl. Phys. 23, L280 (1984)
101. B. Szyszka, Thin Solid Films 351, 164 (1999)
102. K. Ellmer, J. Phys. D Appl. Phys. 34, 3097 (2001)
103. Abrisa Corporate Office, Data sheet and product information: Corning 1737, http://www.abrisa.com/downloads/corning 1737F.pdf. Last check 23 Apr 2007
104. J.M. Ting, B.S. Tsai, Mater. Chem. Phys. 72, 273 (2001)
105. L.J. van der Pauw, Research Report 1, Phillips, 1958
106. E. Burstein, Phys. Rev. 93, 632 (1954)
107. T.S. Moss, Proc. Phys. Soc. B 67, 775 (1954)
108. K.L. Chopra, S. Major, D.K. Pandya, Thin Solid Films 102, 1 (1983)
109. A.N. Mariano, R.E. Hanneman, J. Appl. Phys. 34, 384 (1963)
110. G. Heiland, P. Kunstmann, Surf. Sci. 13, 72 (1969)
111. F.C.M. van de Pol, F.R. Blom, T.J.A. Popma, Thin Solid Films 204, 349 (1991)
112. Y. Li, G.S. Tompa, S. Liang, C. Gorla, Y. Lu, J. Doyle, J. Vac. Sci. Technol. A 15, 1063 (1997)
113. H. Maki, T. Ikoma, I. Sakaguchi, N. Ohashi, H. Haneda, J. Tanaka, N. Ichinose, Thin Solid Films 411, 91 (2002)
114. J. Zhu, N.W. Emanetoglu, Y. Chen, B.V. Yakshinskiy, Y. Lu, J. Electron. Mater. 33, 556 (2004)
115. J.G.E. Gardeniers, Z.M. Rittersma, G.J. Burger, J. Appl. Phys. 83, 7844 (1998)
116. H.C. Gatos, J. Appl. Phys. 32, 1232 (1961)
117. W. Jo, S.J. Kim, D.Y. Kim, Acta Mater. 53, 4185 (2005)
118. J. Hüpkes, Master thesis (2001)
119. Y. Mai, Ph.D. thesis, Nankai University (2006)
120. J.A. Thornton, J. Vac. Sci. Technol. 11, 666 (1974)
121. J.A. Thornton, J. Vac. Sci. Technol. A 4, 3059 (1986)
122. J. Hüpkes, B. Rech, O. Kluth, T. Repmann, B. Sehrbrock, J. Müller, R. Drese, M. Wuttig, Sol. Energ. Mater. Sol. Cell. 90(18–19), 3054 (2006)
123. M. Berginski, B. Rech, J. Hüpkes, H. Stiebig, M. Wuttig, J. Appl. Phys. 101, 074903 (2007)
124. J. Hüpkes, Ph.D. thesis, Rheinisch-Westfählische Technische Hochschule (2005)
125. J. Strümpfel, G. Beister, D. Schulze, M. Kammer, S. Rehn, in Proceedings of the 40th Annual Technical Conference of the Society of Vacuum Coaters, New Orleans, USA, 1997, p. 179
126. O. Kluth, G. Schöpe, B. Rech, R. Menner, M. Oertel, K. Orgassa, H.W. Schock, Thin Solid Films 502, 311 (2006)
127. K.J. Nordheden, in Proceedings of the SPIE – Quantum Sensing and Nanophotonic Devices, Vol. 5359, San Jose, USA, 2004, ed. by M. Razeghi, G.J. Brown
128. M. Hiramatsu, K. Imaeda, N. Horio, M. Nawata, J. Vac. Sci. Technol. A 16, 669 (1998)
129. K. Ip, M.E. Overberg, K.W. Baik, R.G. Wilson, S.O. Kucheyev, J.S. Williams, C. Jagadish, F. Ren, Y.W. Heo, D.P.N.J.M. Zavada, S.J. Pearton, Solid State Electron. 47, 2289 (2003)
130. J.W. Bae, C.H. Jeong, H.K. Kim, K.K. Kim, N.G. Cho, T.Y. Seong, S.J. Park, I. Adesida, G.Y. Yeom, Jpn. J. Appl. Phys. 42, L553 (2003)
131. K. Tominaga, K. Kuroda, O. Toda, Jpn. J. Appl. Phys. 27, 1176 (1988)
132. T. Minami, H. Nanto, H. Sato, S. Takata, Thin Solid Films 164, 275 (1988)
133. J. Hüpkes, B. Rech, O. Kluth, J. Müller, H. Siekmann, C. Agashe, H.P. Bochem, M. Wuttig, Mat. Res. Soc. Symp. Proc. 762, A7.11 (2003)
134. T. Yamamoto, T. Shiosaki, A. Kawabata, J. Appl. Phys. 51, 3113 (1980)
135. A. Klein, Termination related features of ZnO etching behavior, private communication, 2005
136. H. Jebsen-Marwedel, R. Brückner, Glastechnische Fabrikationsfehler (Springer, Berlin Heidelberg New York, 1980)
137. H.J. Gläser, Large Area Glass Coating, vol. 1 (von Ardenne, Dresden, 2000)
138. W. Meisel, Glass Sci. Technol. 72, 291 (1999)
139. C. Wang, K. Appelfeller, T. Giese, G. Krausch, in Tagungsband der 78. Glastechnischen Tagung, Nürnberg, Germany, 2004, p. 176
140. S. Kürbitz, T. Rainer, K.J. Berg, G. Berg, in Tagungsband der 78. Glastechnischen Tagung, Nürnberg, Germany, 2004, p. 161
141. H.K. Pulker, Coatings on Glass (Elsevier, Amsterdam Oxford New York Tokyo, 1984)
142. V. Sittinger, F. Ruske, W. Werner, B. Szyszka, B. Rech, J. Hüpkes, G. Schöpe, H. Stiebig, Thin Solid Films 496, 16 (2006)
143. J. Müller, G. Schöpe, O. Kluth, B. Rech, M. Ruske, J. Trube, B. Szyszka, X. Jiang, G. Bräuer, Thin Solid Films 392, 327 (2001)
144. D.A.G. Bruggeman, Annalen der Physik 24, 636 (1935)
145. P. Lechner, R. Geyer, H. Schade, B. Rech, O. Kluth, H. Stiebig, in Proceedings of the 19th European Photovoltaic Solar Energy Conference, Paris, France, 2004, p. 1591
146. O. Kluth, C. Zahren, H. Stiebig, B. Rech, H. Schade, in Proceedings of the 19th European Photovoltaic Solar Energy Conference, Paris, France, 2004, p. 1587
147. M. Vanecek, J. Springer, A. Poruba, O. Kluth, T. Repmann, B. Rech, N. Wyrsch, J. Meier, A. Shah, in Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion, Osaka, Japan, 2003, p. 1527
148. K.L. Chopra, S.R. Das, Thin Film Solar Cells (Plenum, New York, 1983)
149. M.A. Green, Silicon Solar Cells – Advanced Principles & Practice (Centre for Photovoltaic Devices and Systems, Sydney, 1995)
150. T. Brammer, J. Hüpkes, M. Krause, O. Kluth, J. Müller, B. Rech, in Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion, Osaka, Japan, 2003, p. 176
151. M. Berginski, B. Rech, J. Hüpkes, G. Schöpe, M.N. van den Donker, W. Reetz, T. Kilper, M. Wuttig, in Proceedings of the 21st European Photovoltaic Solar Energy Conference, Dresden, Germany, 2006, p. 1539
152. B. Rech, G. Schöpe, O. Kluth, T. Repmann, T. Roschek, J. Müller, J. Hüpkes, H. Stiebig, in Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion, Osaka, Japan, 2003, p. 2783
153. Y. Mai, S. Klein, R. Carius, H. Stiebig, X. Geng, F. Finger, Appl. Phys. Lett. 87, 073503 (2005)
154. T. Repmann, T. Kilper, W. Appenzeller, C. Zahren, H. Stiebig, B. Rech, in Proceedings of the 31rd IEEE Photovoltaic Specialist Conference, Orlando, USA, 2005, p. 1383
155. B. Rech, T. Repmann, J. Hüpkes, M. Berginski, H. Stiebig, W. Beyer, V. Sittinger, F. Ruske, in Proceedings of the 20th European Photovoltaic Solar Energy Conference, Barcelona, Spain, 2005, p. 1481
156. V. Sittinger, F. Ruske, W. Werner, B. Szyszka, B. Rech, G. Schöpe, J. Hüpkes, in Proceedings of the 20th European Photovoltaic Solar Energy Conference, Barcelona, Spain, 2005, p. 1667
157. T. Tohsophon, J. Hüpkes, H. Siekmann, B. Rech, M. Schultheis, N. Sirikulrat, in Proceedings of the 6th International Conference on Coatings on Glass and Plastics, Dresden, Germany, 2006, p. 397
158. U. Kroll, J. Meier, S. Benagli, T. Roschek, J. Spitznagel, A. Huegli, D. Borello, M. Mohr, O. Kluth, D. Zimin, G. Monteduro, J. Springer, G. Androutsopoulos, C. Ellert, W. Stein, G. Buechel, A. Zindl, A. Buechel, D. Koch-Ospelt, in Proceedings of the 21st European Photovoltaic Solar Energy Conference, Dresden, Germany, 2006, p. 1546
159. K. Yamamoto, A. Nakajima, M. Yoshimi, T. Sawada, S. Fukuda, T. Suezaki, M. Ichikawa, Y. Koi, M. Goto, T. Meguro, T. Matsuda, M. Kondo, T. Sasaki, Y. Tawada, in Technical Digest of the 15th International Photovoltaic Science and Engineering Conference, Shanghai, China, 2005, p. 529
160. B. Yan, G. Yue, J.M. Owens, J. Yang, S. Guha, in Proceedings of the 4th World Conference on Photovoltaic Solar Energy Conversion, Waikaloa, USA, 2006, p. 1477
161. H. Takatsuka, Y. Yamauchi, M. Fukagawa, H. Mashima, K. Kawamura, K. Yamaguchi, T. Nishimiya, Y. Takeuchi, in Proceedings of the 21st European Photovoltaic Solar Energy Conference, Dresden, Germany, 2006, p. 1531