DC reactive sputter deposition of ZnO:Al thin film on glass

Materials Chemistry and Physics

Volumn 72, Issue 2, 2001, Pages 273-277

  Ting, Jyh Ming ^a   Tsai, B S ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Electrical conductivity; Electron microscopy; Physical vapor deposition; Thin films

Indexed keywords

CRYSTAL STRUCTURE; DOPING (ADDITIVES); ELECTRIC CONDUCTIVITY; ELECTRON MICROSCOPY; GLASS; PARTIAL PRESSURE; PHYSICAL VAPOR DEPOSITION; REFRACTIVE INDEX; SEMICONDUCTING FILMS; THIN FILMS; ZINC OXIDE;

SEMICONDUCTING METAL OXIDE THIN FILMS;

METALLIC FILMS;

EID: 0035501114     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0254-0584(01)00451-5     Document Type: Article

References (14)