High precision optical sensors for real-time on-line measurement of straightness and angular errors for smart manufacturing

Smart Science

Volumn 4, Issue 3, 2016, Pages 134-141

  Lee, Hau Wei ^a   Liu, Chien Hung ^b  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^b NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

Laser collimation; Laser triangulation; PZT compensation stage; Silicon wafer; Straightness compensation

Indexed keywords

EID: 85035341258     PISSN: None     EISSN: 23080477     Source Type: Journal    
DOI: 10.1080/23080477.2016.1207407     Document Type: Article

References (20)

1. Schwenke H, Knapp W, Haitjema H, et al. Geometric error measurement and compensation of machines-An update. CIRP Ann. Manuf. Technol. 2008;57:660-675.
2. Gao W, Arai Y, Shibuya A, et al. Measurement of multidegree-of-freedom error motions of a precision linear air-bearing stage. Precis. Eng. 2006;30:96-103.
3. Liu CH, Jywe WY, Hsu CC, et al. Development of a laser-based high-precision six-degrees-of-freedom motion errors measuring system for linear stage. Rev. Sci. Instrum. 2005;76:55110-55116.
4. Qibo F, Bin Z, Cunxing C, et al. Development of a simple system for simultaneously measuring 6DOF geometric motion errors of a linear guide. Opt. Express. 2013;21:25805-25819.
5. Ottonelli S, Dabbicco M, De Lucia F, et al. Laser‐selfmixing interferometry for mechatronics applications. Sensors. 2009;9:3527-3548.
6. Kuang C, Hong E, Ni J. A high-precision five-degree-offreedom measurement system based on laser collimator and interferometry techniques. Rev. Sci. Instrum. 2007;78:095105.
7. Cui C, Feng QB, Zhang B, et al. System for simultaneously measuring 6DOF geometric motion errors using a polarization maintaining fiber-coupled dual-frequency laser. Opt. Express. 2016;24:6735-6748.
8. Huang P, Li Y, Wei H, et al. Five-degrees-of-freedom measurement system based on a monolithic prism and phase-sensitive detection technique. Appl. Opt. 2013;52:6607-6615.
9. Qianghua C, Lin D, Wu J, et al. Straightness/coaxiality measurement system with transverse Zeeman dualfrequency laser. Meas. Sci. Technol. 2005;16:2030-2037.
10. Chen B, Zhang E, Yan L, et al. A laser interferometer for measuring straightness and its position based on heterodyne interferometry. Rev. Sci. Instrum. 2009;80:115113-115115.
11. Vekteris V, Jurevichius M, Strishka V. Two-dimensional straightness measurement using optical meter. Opt. Eng. 2009;47:123605.
12. Hwang J, Park CH, Gao W, et al. A three-probe system for measuring the parallelism and straightness of a pair of rails for ultra-precision guideways. Int. J. Mach. Tools Manuf. 2007;47:1053-1058.
13. Fung EHK. An experimental five-sensor system for measuring straightness and yawing motion errors of a linear slide. Meas. Sci. Technol. 2008;19:075102.
14. Liu CH, Jywe WY, Chen CK. Development of a diffraction-type optical triangulation sensor. Appl. Opt. 2000;43:5607-5613.
15. Liu CH, Jywe WY, Shyu LH, et al. Application of a diffraction grating and position sensitive detectors to the measurement of error motion and angular indexing of an indexing table. Precis. Eng. 2005;29:440-448.
16. Liu CH, Huang HL, Lee HW. Five-degrees-of-freedom diffractive laser encoder. Appl. Opt. 2009;48:2767-2777.
17. Liu CH, Cheng CH. Development of a grating based multi-degree-of-freedom laser linear encoder using diffracted light. Sensors Actuators, A. 2012;181:87-93.
18. Chen CK, Liu CH, Cheng CH. Multi-DOF incremental optical encoder with laser wavelength compensation. Smart Sci. 2013;1:1-12.
19. Liu CH, Jeng YR, Jywe WY, et al. Automatic straightness measurement of a linear guide using a real-time straightness self-compensating scanning stage. Proc. Inst. Mech. Eng. Part B: J. Eng. Manuf. 2009;223:1171-1179.
20. Liu CH, Chen JH, Teng YF. Development of a straightness measurement and compensation system with multiple right-angle reflectors and a lead zirconate titanate-based compensation stage. Rev. Sci. Instrum. 2009;80:115105-115105.