Multi-DOF incremental optical encoder with laser wavelength compensation

Smart Science

Volumn 1, Issue 1, 2013, Pages 1-12

  Chen, Cha'o Kuang ^a   Liu, Chien Hung ^b   Cheng, Chung Hsiang ^c  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

^c NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Diffraction theory; Interference technique; Laser optical encoder; Multi DOF; Principle of auto collimator; Wavelength monitoring

Indexed keywords

EID: 84992141085     PISSN: None     EISSN: 23080477     Source Type: Journal    
DOI: 10.1080/23080477.2013.11665580     Document Type: Article

References (22)

1. Renishaw, http://www.renishaw.com.
2. Heidenhain, http://www.heidenhain.com
3. Sony, http://www.sonysms.com
4. MicroE System, http://www.microesys.com
5. P.L.M. Heydemann, “Determination and correction of quadrature fringe measurement errors in interferometers ” Applied Optics, 20, 3382-3384 (1981)
6. K. Akiyama and H. Iwaoka, High resolution digital diffraction grating scale encoder, U.S. Patent, 4,629,886 (1986)
7. K. Taniguchi, H. Tsuchiya and M. Toyama, Optical instrument for measuring displacement, U.S. Patent, 4,676,645 (1987)
8. S. Ishii, T. Nishimura, K. Ishizuka and M. Tsukiji, Optical type encoder including diffraction grating for producing interference fringes that are processed to measure displacement, U.S. Patent, 4,912,320 (1990)
9. K. Ishizuka, T. Nishimura and O. Kasahara, Rotary encoder using reflected light, U.S. Patent, 5,036,192 (1991)
10. T. Nishimura, Y. Kubota, S. Ishii, K. Ishizuka and M. Tsukiji, Encoder incorporating a displaceable diffraction grating, U.S. Patent, 5,038,032. (1991)
11. K. Ishizuka and T. Nishimura, Encoder with high resolving power and accuracy, U.S. Patent, 5,146,085 (1992)
12. A. Spies and A. Teimel, Position measuring apparatus utilizing two-beam interferences to create phase displaced signals, U.S. Patent, 5,120,132 (1992)
13. K.G. Masreliez, Position detector and method of measuring position, U.S. Patent, 5,104,225 (1992)
14. J.D. Lin, and H.B. Kuo, “Development of a new optical scale system by the diffractive phase interference method” Measurement Science and Technology, 6, 293-296 (1995)
15. D.H. Mollenhauer and P.G. Ifju and B. Han,“A compact, robust and versatile Moire interferometer” Optics and Laser in Engineering, 23, 29-40 (1995)
16. W.W. Chiang and C.K. Lee, Wavefront reconstruction optics for use in a disk drive position measurement system, U.S. Patent, 5,442,172 (1995)
17. D.K. Mitchell and W.G. Thorburn, Apparatus for detecting relative movement wherein a detecting means is positioned in the region of natural interference, U.S. Patent, 5,486,923 (1996)
18. J.R. Henshaw, Opto-electronic scale reading apparatus with differing optical path lengths, U.S. Patent, 5,861,953 (1999)
19. R. Sawada, E. Higurashi, T. Ito, O. Ohguchi and M. Tsubamoto, “Monolithic-integrated microlaser encoder” Applied Optics, 38, 6866-6873 (1999)
20. A. Kuroda, Optical displacement measurement system for detecting the relative movement of a machine part, U.S. Patent, 6,166,817 (2000)
21. C.K. Lee, C.C. Wu, S.J. Chen, L.B. Yu, Y.C. Chang, Y.F. Wang, J.Y. Chen, and J.W.J. Wu, “Design and construction of linear laser encoders that possess high tolerance of mechanical run out ” Applied Optics, 43, 5754-5762 (2004)
22. C.H. Liu, H.L. Huang and H.W. Lee, “Five-degrees-of-freedom diffractive laser encoder” Applied Optics, 48, 2767-2777 (2009)