Application of a diffraction grating and position sensitive detectors to the measurement of error motion and angular indexing of an indexing table

Precision Engineering

Volumn 29, Issue 4, 2005, Pages 440-448

  Liu, Chien Hung ^a   Jywe, Wen Yuh ^a   Shyu, Lih Horng ^a   Chen, Chun Jen ^b  

^a NATIONAL FORMOSA UNIVERSITY   (Taiwan)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Angular indexing; Axis of rotation; Diffraction grating; Position sensitive detector; Rotation accuracy

Indexed keywords

ALGEBRA; LASER BEAMS; PRECISION ENGINEERING; SEMICONDUCTOR LASERS;

ANGULAR INDEXING; AXIS OF ROTATION; POSITION SENSITIVE DETECTOR; ROTATION ACCURACY;

DIFFRACTION GRATINGS;

EID: 24944504773     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2004.12.002     Document Type: Article

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