Automatic straightness measurement of a linear guide using a real-time straightness self-compensating scanning stage

Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture

Volumn 223, Issue 9, 2009, Pages 1171-1179

  Liu, C H ^a   Jeng, Y R ^a   Jywe, W Y ^a   Deng, S Y ^a   Hsu, T H ^a  

^a NATIONAL CHUNG CHENG UNIVERSITY   (Taiwan)

Author keywords

Dimensional measurement; Error separation; Laser technology; Linear guide; Quadrant detector; Straightness

Indexed keywords

DIMENSIONAL MEASUREMENT; ERROR SEPARATION; LASER TECHNOLOGY; LINEAR GUIDE; QUADRANT DETECTOR; STRAIGHTNESS;

EDDY CURRENT TESTING; LASERS; MEASUREMENTS; SCANNING; SENSORS;

ERROR COMPENSATION;

EID: 70349199271     PISSN: 09544054     EISSN: None     Source Type: Journal    
DOI: 10.1243/09544054JEM1319     Document Type: Article

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