A high-precision five-degree-of-freedom measurement system based on laser collimator and interferometry techniques

Review of Scientific Instruments

Volumn 78, Issue 9, 2007, Pages

  Kuang, Cuifang ^a   Hong, En ^b   Ni, Jun ^b  

^a BEIJING INSTITUTE OF TECHNOLOGY   (China)

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ERROR ANALYSIS; INTERFEROMETRY; LENSES; OPTICAL COLLIMATORS; PARAMETER ESTIMATION; ROTATION;

CURRENT LINEAR INTERFEROMETER; LASER COLLIMATOR; LENS MAGNIFICATION; TWO-DIMENSIONAL STRAIGHTNESS ERROR MEASUREMENT;

DEGREES OF FREEDOM (MECHANICS);

EID: 34848820870     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2786272     Document Type: Article

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