Five-degrees-of-freedom diffractive laser encoder

Applied Optics

Volumn 48, Issue 14, 2009, Pages 2767-2777

  Liu, Chien Hung ^a   Huang, Hsueh Liang ^a   Lee, Hau Wei ^b  

^a NATIONAL FORMOSA UNIVERSITY   (Taiwan)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CIRCULAR POLARIZATION; DEGREES OF FREEDOM (MECHANICS); DIFFRACTION; DIFFRACTION GRATINGS; ERRORS; INTERFEROMETRY; MECHANICS;

CIRCULAR POLARIZED; DIFFRACTION LIGHT; INTERFEROMETRIC TECHNIQUES; LINEAR DISPLACEMENTS; MEASUREMENT ACCURACY; PRECISION POSITIONING; QUADRANT PHOTODIODE DETECTORS; RAY-TRACING METHOD;

RAY TRACING;

EID: 67649279552     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.48.002767     Document Type: Article

References (16)

1. http://www.renishaw.com.
2. Catalog, Heidenhain, http://www.heidenhain.com/main.html.
3. http://www.sonysms.com.
4. P. L. M. Heydemann, "Determination and correction of quadrature fringe measurement errors in interferometers," Appl. Opt. 20, 3382-3384 (1981).
5. L. M. Sanchez-Brea and T. Morlanes "Metrological errors in optical encoders," Meas. Sci. Technol. 19, 115104 (2008).
6. T. Keem, S. Gonda, I. Misumi, Q. Huang, and T. Kurosawa, "Simple, real-time method for removing the cyclic error of a homodyne interferometer with a quadrature detector system," Appl. Opt. 44, 3492-3498 (2005).
7. Hewlett Packard Co., "Optics and laser heads for laser interferometer positioning systems," product overview (2000).
8. Catalog, SIOS Messtechnik Gmbh (2003).
9. D. Crespo, J. Alonso, and E. Bernabeu, "Reflection optical encoders as three-grating moiré systems," Appl. Opt. 39, 3805-3813 (2000).
10. D. Crespo, T. Morlanes, and E. Bernabeu, "Optical encoder based on the Lau effect," Opt. Eng. 39, 817-824 (2000).
11. J.-D. Lin and H. B. Kuo, "Development of a new optical scale system by the diffractive phase interference method," Meas. Sci. Technol. 6, 293-296 (1995).
12. C. K. Lee, C. C. Wu, S. J. Chen, L. B. Yu, Y. C. Chang, Y. F. Wang, J. Y. Chen, and J. W. J. Wu, "Design and construction of linear laser encoders that possess high tolerance of mechanical run out," Appl. Opt. 43, 5754-5762 (2004).
13. H. L. Huang, C. H. Liu, W. Y. Jywe, M. S. Wang, and T. H. Fang, "Development of a three-degree-of-freedom laser linear encoder for error measurement ofa high precision stage," Rev. Sci. Instrum. 78, 066103 (2007).
14. V. Greco, G. Molesini, and F. Quercioli, "Accurate polarization interferometer," Rev. Sci. Instrum. 66, 3729-3734 (1995).
15. J. A. Terrence, Applied Numerical Methods for Engineers (Wiley, 1993).
16. R. M. Murray, Z. Li, and S. S. Sastry, A Mathematical Introduction to Robotic Manipulation (CRC Press, 2000).