SCOPUS 정보 검색 플랫폼

Review of Scientific Instruments

Volumn 80, Issue 11, 2009, Pages

A laser interferometer for measuring straightness and its position based on heterodyne interferometry

(6) Chen, Benyong a Zhang, Enzheng a Yan, Liping a Li, Chaorong a Tang, Wuhua a Feng, Qibo b

a ZHEJIANG SCI TECH UNIVERSITY (China)

b BEIJING JIAOTONG UNIVERSITY (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPACT STRUCTURES; HETERODYNE INTERFEROMETRY; HIGH PRECISION; LASER INTERFEROMETER; LINEAR STAGES; MEASUREMENT PRINCIPLE; NANOMETER MEASUREMENT; OPTICAL CONFIGURATIONS; RELATIVE POSITIONS; STRAIGHTNESS ERRORS;

FILLERS; HETERODYNING; LASER INTERFEROMETRY; LASERS; LIGHT MEASUREMENT;

INTERFEROMETERS;

EID: 71749094331 PISSN: 00346748 EISSN: None Source Type: Journal
DOI: 10.1063/1.3266966 Document Type: Article

Times cited : (38)

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