An experimental five-sensor system for measuring straightness and yawing motion errors of a linear slide

Measurement Science and Technology

Volumn 19, Issue 7, 2008, Pages

  Fung, Eric H K ^a  

^a HONG KONG POLYTECHNIC UNIVERSITY   (Hong Kong)

Author keywords

Error motion; Error separation; Five sensor system; Linear slide; On machine measurement; Straightness measurement; Yawing error

Indexed keywords

INTERFEROMETERS; LASER INTERFEROMETRY; UNCERTAINTY ANALYSIS;

ERROR MOTION; ERROR SEPARATION; FIVE-SENSOR SYSTEM; LINEAR SLIDE; ON MACHINE MEASUREMENT; STRAIGHTNESS MEASUREMENT; YAWING ERROR;

ERRORS;

EID: 46749148834     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/19/7/075102     Document Type: Article

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