메뉴 건너뛰기




Volumn 21, Issue 22, 2013, Pages 25805-25819

Development of a simple system for simultaneously measuring 6DOF geometric motion errors of a linear guide

Author keywords

[No Author keywords available]

Indexed keywords

GEOMETRY; LASER BEAMS; STATISTICS;

EID: 84887498782     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.21.025805     Document Type: Conference Paper
Times cited : (95)

References (34)
  • 1
    • 0034264959 scopus 로고    scopus 로고
    • Vertical machining center accuracy characterization using laser interferometer, part one: Linear positional errors
    • A. C. Okafor and Y. M. Ertekin, "Vertical machining center accuracy characterization using laser interferometer, part one: linear positional errors," J. Mater. Process. Technol. 105(3), 394-406 (2000).
    • (2000) J. Mater. Process. Technol. , vol.105 , Issue.3 , pp. 394-406
    • Okafor, A.C.1    Ertekin, Y.M.2
  • 2
    • 0034263079 scopus 로고    scopus 로고
    • Vertical machining center accuracy characterization using laser interferometer, part two: Angular errors
    • A. C. Okafor and Y. M. Ertekin, "Vertical machining center accuracy characterization using laser interferometer, part two: angular errors," J. Mater. Process. Technol. 105(3), 407-420 (2000).
    • (2000) J. Mater. Process. Technol. , vol.105 , Issue.3 , pp. 407-420
    • Okafor, A.C.1    Ertekin, Y.M.2
  • 3
    • 85012101907 scopus 로고
    • A multi-degree-of-freedom measurement system for CMM geometric errors
    • J. Ni, P. S. Huang, and S. M. Wu, "A multi-degree-of-freedom measurement system for CMM geometric errors," ASME J. Eng. Ind. 114, 362-389 (1992).
    • (1992) ASME J. Eng. Ind. , vol.114 , pp. 362-389
    • Ni, J.1    Huang, P.S.2    Wu, S.M.3
  • 4
    • 0029304427 scopus 로고
    • On-line error compensation of coordinate measuring machine
    • P. S. Huang and J. Ni, "On-line error compensation of coordinate measuring machine," Int. J. Mach. Tools Manuf. 35(5), 725-738 (1995).
    • (1995) Int. J. Mach. Tools Manuf. , vol.35 , Issue.5 , pp. 725-738
    • Huang, P.S.1    Ni, J.2
  • 5
    • 18744370482 scopus 로고    scopus 로고
    • Development of a laser-based high-precision six-degrees-offreedom motion errors measuring system for linear stage
    • C. H. Liu, W. Y. Jywe, C. C. Hsu, and T. H. Hsu, "Development of a laser-based high-precision six-degrees-offreedom motion errors measuring system for linear stage," Rev. Sci. Instrum. 76(5), 055110 (2005).
    • (2005) Rev. Sci. Instrum. , vol.76 , Issue.5 , pp. 055110
    • Liu, C.H.1    Jywe, W.Y.2    Hsu, C.C.3    Hsu, T.H.4
  • 6
    • 0031139754 scopus 로고    scopus 로고
    • CCD-based geometrical error measurement using Fourier phase shift algorithm
    • C. Chou, L. Y. Chou, C. K. Peng, Y. C. Huang, and K. C. Fan, "CCD-based geometrical error measurement using Fourier phase shift algorithm," Int. J. Mach. Tools Manuf. 37(5), 579-590 (1997).
    • (1997) Int. J. Mach. Tools Manuf. , vol.37 , Issue.5 , pp. 579-590
    • Chou, C.1    Chou, L.Y.2    Peng, C.K.3    Huang, Y.C.4    Fan, K.C.5
  • 7
    • 0001464846 scopus 로고
    • Simultaneous measuring method of table motion errors in 6 degrees of freedom
    • S. Shimizu, H. S. Lee, and N. Imai, "Simultaneous measuring method of table motion errors in 6 degrees of freedom," Int. J. Japan Soc. Prec. Eng 28, 273-274 (1994).
    • (1994) Int. J. Japan Soc. Prec. Eng , vol.28 , pp. 273-274
    • Shimizu, S.1    Lee, H.S.2    Imai, N.3
  • 8
    • 84887430699 scopus 로고    scopus 로고
    • Four degree-of-freedom geometric measurement system with common-path compensation for laser beam drift
    • Q. Feng, B. Zhang, and C. Kuang, "Four degree-of-freedom geometric measurement system with common-path compensation for laser beam drift," Int. J. Prec. Eng. Manufact. 9, 26-31 (2008).
    • (2008) Int. J. Prec. Eng. Manufact. , vol.9 , pp. 26-31
    • Feng, Q.1    Zhang, B.2    Kuang, C.3
  • 9
    • 26844565091 scopus 로고    scopus 로고
    • A four-degree-of-freedom laser measurement system (FDMS) using a single-mode fiber-coupled laser module
    • C. Kuang, Q. Feng, B. Zhang, B. Liu, S. Chen, and Z. Zhang, "A four-degree-of-freedom laser measurement system (FDMS) using a single-mode fiber-coupled laser module," Sen. Actuators A 125(1), 100-108 (2005).
    • (2005) Sen. Actuators A , vol.125 , Issue.1 , pp. 100-108
    • Kuang, C.1    Feng, Q.2    Zhang, B.3    Liu, B.4    Chen, S.5    Zhang, Z.6
  • 10
    • 0032020934 scopus 로고    scopus 로고
    • A six-degree-of-freedom measurement system for the motion accuracy of linear stages
    • K. C. Fan, M. J. Chen, and W. M. Huang, "A six-degree-of-freedom measurement system for the motion accuracy of linear stages," Int. J. Mach. Tools Manuf. 38(3), 155-164 (1998).
    • (1998) Int. J. Mach. Tools Manuf. , vol.38 , Issue.3 , pp. 155-164
    • Fan, K.C.1    Chen, M.J.2    Huang, W.M.3
  • 11
    • 0033730123 scopus 로고    scopus 로고
    • 6-Degree-of-freedom measurement system for the accuracy of X-Y stages
    • K. C. Fan and M. J. Chen, "6-Degree-of-freedom measurement system for the accuracy of X-Y stages," Precis. Eng. 24(1), 15-23 (2000).
    • (2000) Precis. Eng. , vol.24 , Issue.1 , pp. 15-23
    • Fan, K.C.1    Chen, M.J.2
  • 12
    • 27844588897 scopus 로고    scopus 로고
    • Measurement of multi-degree-of-freedom error motions of a precision linear air-bearing stage
    • W. Gao, Y. Arai, A. Shibuya, S. Kiyono, and C. H. Park, "Measurement of multi-degree-of-freedom error motions of a precision linear air-bearing stage," Precis. Eng. 30(1), 96-103 (2006).
    • (2006) Precis. Eng. , vol.30 , Issue.1 , pp. 96-103
    • Gao, W.1    Arai, Y.2    Shibuya, A.3    Kiyono, S.4    Park, C.H.5
  • 13
    • 67649279552 scopus 로고    scopus 로고
    • Five-degrees-of-freedom diffractive laser encoder
    • C. H. Liu, H. L. Huang, and H. W. Lee, "Five-degrees-of-freedom diffractive laser encoder," Appl. Opt. 48(14), 2767-2777 (2009).
    • (2009) Appl. Opt. , vol.48 , Issue.14 , pp. 2767-2777
    • Liu, C.H.1    Huang, H.L.2    Lee, H.W.3
  • 14
    • 0036132852 scopus 로고    scopus 로고
    • Design methods for six-degree-of-freedom displacement measurement systems using cooperative targets
    • J. A. Kim, E. W. Bae, S. H. Kim, and Y. K. Kwak, "Design methods for six-degree-of-freedom displacement measurement systems using cooperative targets," Precis. Eng. 26(1), 99-104 (2002).
    • (2002) Precis. Eng. , vol.26 , Issue.1 , pp. 99-104
    • Kim, J.A.1    Bae, E.W.2    Kim, S.H.3    Kwak, Y.K.4
  • 15
    • 0001107828 scopus 로고    scopus 로고
    • Six-degree-of-freedom displacement measurement system using a diffraction grating
    • J. S. Kim, K. C. Kim, E. W. Bae, S. H. Kim, and Y. K. Kwak, "Six-degree-of-freedom displacement measurement system using a diffraction grating," Rev. Sci. Instrum. 71(8), 3214-3219 (2000).
    • (2000) Rev. Sci. Instrum. , vol.71 , Issue.8 , pp. 3214-3219
    • Kim, J.S.1    Kim, K.C.2    Bae, E.W.3    Kim, S.H.4    Kwak, Y.K.5
  • 16
    • 84859227582 scopus 로고    scopus 로고
    • Exact analytical approach for six-degree-of-freedom measurement using image-orientation-change method
    • C. Y. Tsai, "Exact analytical approach for six-degree-of-freedom measurement using image-orientation-change method," J. Opt. Soc. Am. A-Opt. Im. Sci. Vision. 29, 385-393 (2012).
    • (2012) J. Opt. Soc. Am. A-Opt. Im. Sci. Vision. , vol.29 , pp. 385-393
    • Tsai, C.Y.1
  • 17
    • 27844508571 scopus 로고    scopus 로고
    • Geometric calibration of a coordinate measuring machine using a laser tracking system
    • U. Kenta, F. Ryosyu, O. Sonko, T. Toshiyuki, and K. Tomizo, "Geometric calibration of a coordinate measuring machine using a laser tracking system," Meas. Sci. Technol. 16(12), 2466-2472 (2005).
    • (2005) Meas. Sci. Technol. , vol.16 , Issue.12 , pp. 2466-2472
    • Kenta, U.1    Ryosyu, F.2    Sonko, O.3    Toshiyuki, T.4    Tomizo, K.5
  • 18
    • 80052736973 scopus 로고    scopus 로고
    • Design and construction of a single unit multi-function optical encoder for a six-degree-of-freedom motion error measurement in an ultra-precision linear stage
    • C. B. Lee, G. H. Kim, and S. K. Lee, "Design and construction of a single unit multi-function optical encoder for a six-degree-of-freedom motion error measurement in an ultra-precision linear stage," Meas. Sci. Technol. 22(10), 105901 (2011).
    • (2011) Meas. Sci. Technol. , vol.22 , Issue.10 , pp. 105901
    • Lee, C.B.1    Kim, G.H.2    Lee, S.K.3
  • 19
    • 0035447310 scopus 로고    scopus 로고
    • Multi-degree-of-freedom displacement measurement system for millistructures
    • E. W. Bae, J. A. Kim, and S. H. Kim, "Multi-degree-of-freedom displacement measurement system for millistructures," Meas. Sci. Technol. 12(9), 1495-1502 (2001).
    • (2001) Meas. Sci. Technol. , vol.12 , Issue.9 , pp. 1495-1502
    • Bae, E.W.1    Kim, J.A.2    Kim, S.H.3
  • 21
    • 27944445856 scopus 로고    scopus 로고
    • Development of a six-degree-of-freedom geometric error measurement system for a meso-scale machine tool
    • S. W. Lee, R. Mayor, and J. Ni, "Development of a six-degree-of-freedom geometric error measurement system for a meso-scale machine tool," J. Manuf. Sci. Eng. 127(4), 857-865 (2005).
    • (2005) J. Manuf. Sci. Eng. , vol.127 , Issue.4 , pp. 857-865
    • Lee, S.W.1    Mayor, R.2    Ni, J.3
  • 22
    • 16444373463 scopus 로고    scopus 로고
    • Nanometric position and displacement measurement of the six degrees of freedom by means of a patterned surface element
    • P. Sandoz, "Nanometric position and displacement measurement of the six degrees of freedom by means of a patterned surface element," Appl. Opt. 44(8), 1449-1453 (2005).
    • (2005) Appl. Opt. , vol.44 , Issue.8 , pp. 1449-1453
    • Sandoz, P.1
  • 23
    • 84887440361 scopus 로고    scopus 로고
    • http://www.apisensor.com/.
  • 24
    • 1642586310 scopus 로고    scopus 로고
    • A straightness measurement system using a single-mode fiber-coupled laser module
    • Q. Feng, B. Zhang, and C. Kuang, "A straightness measurement system using a single-mode fiber-coupled laser module," Opt. Laser Technol. 36(4), 279-283 (2004).
    • (2004) Opt. Laser Technol. , vol.36 , Issue.4 , pp. 279-283
    • Feng, Q.1    Zhang, B.2    Kuang, C.3
  • 25
    • 36148968990 scopus 로고    scopus 로고
    • A novel method to enhance the sensitivity for twodegrees- of-freedom straightness measurement
    • C. Kuang, E. Hong, Q. Feng, B. Zhang, and Z. Zhang, "A novel method to enhance the sensitivity for twodegrees- of-freedom straightness measurement," Meas. Sci. Technol. 18(12), 3795-3800 (2007).
    • (2007) Meas. Sci. Technol. , vol.18 , Issue.12 , pp. 3795-3800
    • Kuang, C.1    Hong, E.2    Feng, Q.3    Zhang, B.4    Zhang, Z.5
  • 26
    • 34447560904 scopus 로고    scopus 로고
    • High-accuracy method for measuring two-dimensional angles of a linear guideway
    • C. Kuang, E. Hong, and Q. Feng, "High-accuracy method for measuring two-dimensional angles of a linear guideway," Opt. Eng. 46(5), 051016 (2007).
    • (2007) Opt. Eng. , vol.46 , Issue.5 , pp. 051016
    • Kuang, C.1    Hong, E.2    Feng, Q.3
  • 27
    • 84655167992 scopus 로고    scopus 로고
    • A simple roll measurement method based on a rectangular-prism
    • Y. Zhai, Q. Feng, and B. Zhang, "A simple roll measurement method based on a rectangular-prism," Opt. Laser Technol. 44(4), 839-843 (2012).
    • (2012) Opt. Laser Technol. , vol.44 , Issue.4 , pp. 839-843
    • Zhai, Y.1    Feng, Q.2    Zhang, B.3
  • 28
    • 58249133638 scopus 로고    scopus 로고
    • A novel method for roll measurement based on grating
    • Y. Zhai, Q. Feng, and B. Zhang, "A novel method for roll measurement based on grating," Acta Opt. Sin. 28, 112-116 (2008).
    • (2008) Acta Opt. Sin. , vol.28 , pp. 112-116
    • Zhai, Y.1    Feng, Q.2    Zhang, B.3
  • 30
    • 58149189929 scopus 로고    scopus 로고
    • A method for roll-angle measurement in multi-degree-of-freedom measuring system
    • R. Cao, B. Zhang, and Q. Feng, "A method for roll-angle measurement in multi-degree-of-freedom measuring system," Acta Opt. Sin. 28(12), 2344-2348 (2008).
    • (2008) Acta Opt. Sin. , vol.28 , Issue.12 , pp. 2344-2348
    • Cao, R.1    Zhang, B.2    Feng, Q.3
  • 31
    • 79960564188 scopus 로고    scopus 로고
    • A novel laser straightness measurement method with a beam bend compensation
    • F. You, B. Zhang, and Q. Feng, "A novel laser straightness measurement method with a beam bend compensation," Optik (Stuttg.) 122(17), 1530-1534 (2011).
    • (2011) Optik (Stuttg.) , vol.122 , Issue.17 , pp. 1530-1534
    • You, F.1    Zhang, B.2    Feng, Q.3
  • 32
    • 79955927468 scopus 로고    scopus 로고
    • Straightness error measurement based on common-path compensation for laser beam drift
    • F. You, Q. Feng, and B. Zhang, "Straightness error measurement based on common-path compensation for laser beam drift," Opt. Prec. Eng. 19(3), 515-519 (2011).
    • (2011) Opt. Prec. Eng. , vol.19 , Issue.3 , pp. 515-519
    • You, F.1    Feng, Q.2    Zhang, B.3
  • 33
    • 84878542369 scopus 로고    scopus 로고
    • Common-path design criteria for laser datum based measurement of small angle deviations and laser autocollimation methods in compliance with the criteria with high accuracy and stability
    • F. Zhu, J. Tan, and J. Cui, "Common-path design criteria for laser datum based measurement of small angle deviations and laser autocollimation methods in compliance with the criteria with high accuracy and stability," Opt. Express 21, 188494 (2013).
    • (2013) Opt. Express , vol.21 , pp. 188494
    • Zhu, F.1    Tan, J.2    Cui, J.3
  • 34
    • 84874091574 scopus 로고    scopus 로고
    • Small angular displacement measurement based on an autocollimator and a common-path compensation principle
    • K. Li, C. Kuang, and X. Liu, "Small angular displacement measurement based on an autocollimator and a common-path compensation principle," Rev. Sci. Instrum. 84(1), 015108 (2013).
    • (2013) Rev. Sci. Instrum. , vol.84 , Issue.1 , pp. 015108
    • Li, K.1    Kuang, C.2    Liu, X.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.