A three-probe system for measuring the parallelism and straightness of a pair of rails for ultra-precision guideways

International Journal of Machine Tools and Manufacture

Volumn 47, Issue 7-8, 2007, Pages 1053-1058

  Hwang, Jooho ^a,c   Park, Chun Hong ^a   Gao, Wei ^b   Kim, Seung Woo ^c  

^a Korea Institute of Machine and Materials   (South Korea)

^b TOHOKU UNIVERSITY   (Japan)

^c Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Parallelism; Profile of a pair of rails; Reversal method; Sequential two point method; Straightness; Ultra precision guideways

Indexed keywords

ALGORITHMS; ERROR CORRECTION; FUNCTION EVALUATION; MEASUREMENT ERRORS; MEASUREMENT THEORY; NUMERICAL METHODS;

PARALLELISM; PROFILE OF A PAIR OF RAILS; SEQUENTIAL TWO-POINT METHOD; STRAIGHTNESS; ULTRA-PRECISION GUIDEWAYS;

RAILROAD TRACKS;

EID: 33947102147     PISSN: 08906955     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijmachtools.2006.10.003     Document Type: Article

References (18)

1. Gao W. Precision nanometrology and its applications to precision nanosystems. International Journal of Precision Engineering and Manufacturing 6 (2005) 14-20
2. Pahk H.J., Park J.S., and Yeo I. Development of straightness measurement technique using the profile matching method. International Journal of Machine Tools and Manufacture 31 (1997) 135-147
3. Donaldson R.R. A simple method for separating spindle error from test ball roundness error. Annales of CIRP 21 (1972) 125-126
4. Estler W.T. Calibration and use of optical straightedges in the metrology of precision machines. Optical Engineering 24 (1985) 372-379
5. Evans C.J., Hocken R.J., and Estler W.T. Self-calibration: reversal, redundancy, error separation, and absolute testing. Annales of CIRP 45 (1996) 617-634
6. H. Tanaka, K. Tazawa, H. Sato, M. O-hori and H. Sekiguchi, Application of a new straightness measurement method to large machine tools, Ann CIRP 30 (1981) 455-459.
7. Tazawa K., Sato H., and O-hori M. A new method for the measurement of the straightness of machine tools and machined work. ASME Journal of Mechanical Design 104 (1982) 587-592
8. Kiyono S., and Gao W. Profile measurement of machined surface with a new differential method. Precision Engineering 16 (1994) 212-218
9. Gao W., and Kiyono S. High accuracy profile measurement of a machined surface by the combined method. Measurement 19 (1996) 55-64
10. Makosch G., and Drollinger B. Surface profile measurement with a scanning differential ac interferometer. Applied Optics 23-24 (1984) 4544-4553
11. Tanaka H., and Sato H. Extensive analysis and development of straightness measurement by sequential two-point method. Transactions of the ASME 108 (1986) 176-182
12. Fung E.H.K., and Yang S.M. An approach to on-machine motion error measurement of a linear slide. Measurement 29 (2001) 51-62
13. Kounosu K., and Kishi T. Measurement of surface profile using smoothed serial three point method. Journal of JSPE 61 (1995) 641-645
14. Gao W., and Kiyono S. On-machine measurement of machined surface using the combined three-point method. JSME International Journal 40 (1997) 253-259
15. Gao W., Yokoyama J., Kojima H., and Kiyono S. Precision measurement of cylinder straightness using a scanning multi-probe system. Precision Engineering 26 (2002) 279-288
16. Yamaguchi J. Measurement of straight motion accuracy using the improved sequential three-point method. Journal of JSPE 59 (1993) 773-778
17. Furukawa M., Gao W., Shimizu H., Kiyono S., Yasutake M., and Takahashi K. Three-dimensional slit width measurement for long precision slot die. Key Engineering Materials 295-296 (2005) 343-348
18. Gao W., Yokoyama J., Kiyono S., and Hitomi N. A scanning multi-probe straightness measurement system for alignment of linear collider accelerator. Key Engineering Materials 295-296 (2005) 253-258