Development of a grating based multi-degree-of-freedom laser linear encoder using diffracted light

Sensors and Actuators, A: Physical

Volumn 181, Issue , 2012, Pages 87-93

  Liu, Chien Hung ^a   Cheng, Chung Hsiang ^b  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Diffraction; Interferometric technique; Linear encoder; Multi degree of freedom

Indexed keywords

ANGULAR ERRORS; DIFFRACTED LIGHT; ENCODER DESIGN; GEOMETRIC VARIATIONS; INTERFEROMETRIC TECHNIQUES; LASER ENCODER; LINEAR DISPLACEMENTS; LINEAR ENCODERS; LINEAR STAGES; MOTION ERRORS; MULTI DEGREE-OF-FREEDOM; QUADRANT PHOTODIODE DETECTORS; RELATIVE MOVEMENT; SPATIAL INFORMATIONS; WAVE SIGNAL;

DIFFRACTION; ERRORS; INTERFEROMETRY; ULTRASONIC DEVICES;

DIFFRACTION GRATINGS;

EID: 84862010060     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2012.05.004     Document Type: Article

References (18)

1. Renishaw, < http://www.renishaw.com/en/optical-linear-encoders-6331 >.
2. Heidenhain, Linear encoders for numerically controlled machine tools, Catalog. < http://www.heidenhain.com >, 2010.
3. < http://www.sonysms.com >.
4. < http://www.numerikjena.de >.
5. D. Crespo, J. Alonso, and E. Bernabeu Reflection optical encoders as three-grating moiré systems Applied Optics 39 2000 3805 3813
6. D. Crespo, T. Morlanes, and E. Bernabeu Optical encoder based on the Lau effect Optical Engineering 39 2000 817 824
7. L. Jen-Dau, and K. Hung-Bin Development of a new optical scale system by the diffractive phase interference method Measurement Science and Technology 6 1995 293 296
8. K. Akiyama, H. Iwaoka, High resolution digital diffraction grating scale encoder, U.S. Patent, No. 4,629,886, 1986.
9. C.K. Lee, C.C. Wu, S.J. Chen, L.B. Yu, Y.C. Chang, Y.F. Wang, J.Y. Chen, and J.W.J. Wu Design and construction of linear laser encoders that possess high tolerance of mechanical run out Applied Optics 43 2004 5754 5762
10. C.-F. Kao, C.C. Chang, and M.-H. Lu Double-diffraction planar encoder by conjugate optics Optical Engineering 44 2005 023603
11. P.L.M. Heydemann Determination and correction of quadrature fringe measurement errors in interferometers Applied Optics 20 1981 3382 3384
12. L.M. Sanchez-Brea, and T. Morlanes Metrological errors in optical encoders Measurement Science and Technology 19 2008 115104
13. T. Keem, S. Gonda, I. Misumi, Q. Huang, and T. Kurosawa Simple, real-time method for removing the cyclic error of a homodyne interferometer with a quadrature detector system Applied Optics 44 2005 3492 3498
14. S. Ishii, T. Nishimura, K. Ishizuka, M. Tsukiji, Optical type encoder including diffraction grating for producing interference fringes that are processed to measure displacement, U.S. Patent No. 4,912,320, 1990.
15. C.H. Liu, W.Y. Jywe, and T.H. Hsu The application of the double-readheads planar encoder system for error calibration of computer numerical control machine tools Proceedings of Institution of Mechanical Engineers Part B: Journal of Engineering 218 2004 1077 1089
16. J. Ni, P.S. Huang, and S.M. Wu A multi-degree-of-freedom measuring system for CMM geometric errors ASME Journal of Engineering for Industry 114 1992 362 369
17. C.H. Liu, H.L. Huang, and H.W. Lee Five degrees of freedom diffractive laser encoder Applied Optics 48 14 2009 2767 2777
18. C.H. Liu, W.Y. Jywe, C.C. Hsu, and T.H. Hsu Development of a laser-based high-precision six-degrees-of-freedom motion errors measuring system for linear stage Review of Scientific Instruments 76 2005 55110 55116