Development of a laser-based high-precision six-degrees-of-freedom motion errors measuring system for linear stage

Review of Scientific Instruments

Volumn 76, Issue 5, 2005, Pages

  Liu, Chien Hung ^a   Jywe, Wen Yuh ^a   Hsu, Cheng Chung ^b   Hsu, Tung Hui ^c  

^a NATIONAL FORMOSA UNIVERSITY   (Taiwan)

^b CHIENKUO TECHNOLOGY UNIVERSITY   (Taiwan)

^c NATIONAL CHUNG CHENG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMACHINING PROCESSING; MOTION ERRORS; MULTIPLE LASERS; ROTATIONAL ERRORS;

DEGREES OF FREEDOM (MECHANICS); DOPPLER EFFECT; INTERFEROMETERS; LASER APPLICATIONS; LASER BEAMS; MICROMACHINING; PRINTED CIRCUIT BOARDS;

ERROR ANALYSIS;

EID: 18744370482     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1915520     Document Type: Article

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