Laser-self-mixing interferometry for mechatronics applications

Sensors

Volumn 9, Issue 5, 2009, Pages 3527-3548

  Ottonelli, Simona ^a   Dabbicco, Maurizio ^a   de Lucia, Francesco ^a   di Vietro, Michela ^a   Scamarcio, Gaetano ^a  

^a UNIVERSITY OF BARI   (Italy)

Author keywords

Displacement measurement; Interferometry; Mechatronics; Physical sensors; Self mixing; Semiconductor laser; Six degrees of freedom

Indexed keywords

EXISTING SYSTEMS; LASER SOURCES; LASER-SELF-MIXING; MULTI DEGREES OF FREEDOM; PHYSICAL SENSORS; PROTOTYPE SYSTEM; SELF-MIXING; SIX DEGREES-OF-FREEDOM;

DISPLACEMENT MEASUREMENT; INTERFEROMETRY; MECHATRONICS; SEMICONDUCTOR LASERS; SENSORS;

MIXING;

EID: 77449125819     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s90503527     Document Type: Review

References (29)

1. Lin, S.T. A laser interferometer for measuring straightness. Opt. Laser Technol. 2001, 33, 195-199.
2. Shi, P.; Stijns, E. New optical method for measuring small-angle rotations. Appl. Opt. 1988, 27, 4342-4344.
3. Zhang, J.H.; Menq, C.H. A linear/angular interferometer capable of measuring large angular motion. Meas. Sci. Technol. 1999, 10, 1247-1253.
4. Wu, C.M.; Chuang, Y.T. Roll angular displacement measurement system with microradian accuracy. Sens. Actuat. A 2004, 116, 145-149.
5. Fan, K.C.; Chen, M.J. A 6-degree-of-freedom measurement system for the accuracy of X-Y stage. Prec. Eng. 2000, 24, 15-23.
6. Bae, E.W.; Kim, J.A.; Kim, S.H. Multi-degree-of-freedom displacement measurement system for milli-structures. Meas. Sci. Technol. 2001, 12, 1495-1502.
7. Park, W.S.; Cho H.S. Measurement of fine 6-degrees-of-freedom displacement of rigid bodies through splitting a laser beam: experimental investigation. Opt. Eng. 2002, 41, 860-871.
8. Liu, C.H.; Jywe, W.Y.; Hsu, C.C.; Hsu, T.H. Development of a laser-based high-precision six- degrees-of-freedom motion errors measuring system for linear stage. Rev. Sci. Instrum. 2005, 76, 055110.
9. Ottonelli, S.; De Lucia, F.; di Vietro, M.; Dabbicco, M.; Scamarcio, G.; Mezzapesa, F.P. A Compact Three Degrees - of - Freedom Motion Sensor Based on the Laser - Self - Mixing Effect. IEEE Phot. Technol. Lett. 2008, 20, 1360-1362.
10. Ottonelli, S.; De Lucia, F.; Dabbicco, M.; Scamarcio, G. Simultaneous measurement of linear and transverse displacements by Laser - Self - Mixing. Appl. Opt., doc. ID 104307 (posted 9 February 2009, in press).
11. Lang R.; Kobayashi K., External optical feedback effects on semiconductor injection laser properties. IEEE J. Quantum Electron. 1980, 16, 347-355.
12. de Groot, P.J.; Gallatin, G.M.; Macomber, S.H. Ranging and velocimetry signal generation in a backscatter-modulated laser diode. App. Opt. 1988, 27, 4475-4480.
13. Giuliani, G.; Norgia, M.; Donati, S.; Bosch, T. Laser diode self-mixing technique for sensing applications. J. Opt. A: Pure Appl. Opt. 2002, 4, S283-S294.
14. Acket, G.A.; Lenstra, D; Den Boef, J.; Verbeek, B.H. The influence of feedback intensity on longitudinal mode properties and optical noise in index-guided semiconductor lasers. IEEE J. Quantum Electron. 1984, 20, 1163-1169.
15. Lenstra, D.; Verbeek, B.H.; den Boef, A.J. Coherence collapse in single-mode semiconductor lasers due to optical feedback. IEEE J. Quantum Electron. 1985, 21, 674-679
16. Donati, S.; Merlo, S. Application of diode laser feedback interferometry. J. Opt. 1998, 29, 156-161.
17. Norgia, M.; Donati, S. A displacement-measuring instrument utilizing self-mixing interferometry. IEEE Trans. Instrum. Meas. 2003, 52, 1765-1770.
18. Laroche, M.; Kervevan, L.; Gilles, H.; Girard, S.; Sahu, J.K. Doppler velocimetry using self- mixing effect in a short Er Yb-doped phosphate glass fiber laser. Appl. Phys. B 2005, 80, 603-607.
19. Roos, P.A.; Stephens, M.; Wieman, C.E. Laser vibrometer based on optical-feedback-induced frequency modulation of a single-mode laser diode. Appl. Opt. 1996, 35, 6754-6761.
20. Krehut, L.; Hast, J.; Alarousu E. Low cost velocity sensor based on the self-mixing effect in a laser diode. Opto-Electron. Rev. 2003, 11, 313-319.
21. Donati, S.; Giuliani, G.; Merlo, S. Laser diode feedback interferometer for measurement of displacements without ambiguity. IEEE J. Quantum Electron. 1995, 31, 113-119.
22. Ottonelli, S.; De Lucia; di Vietro, M.; Dabbicco, M.; Scamarcio, G.; Mezzapesa, F.P.; Plantamura, M.C.; Polito, S.; Florio, C.; Ottonelli, F.P. System for laser measurement of target motion. 2008, Patent Pending, PCT/EP2008/005422.
23. Ottonelli, S. Laser - Self - Mixing Interferometry for displacement sensors in mechatronics. PhD dissertation, University of Bari, Italy, 2009.
24. Ottonelli, S.; De Lucia; di Vietro, M.; Dabbicco, M.; Scamarcio, G. Comparison of plane mirror vs retroreflector peformance for Laser-Self-Mixing displacement sensors. In Proc. First Mediterranean Photonics Conference, Ischia, Italy, 2008; pp. 290-292.
25. Giuliani, G.; Donati, D., Passerini, M.; Bosch, T. Angle measurement by injection detection in a laser diode. Opt. Eng. 2001, 40, 95-99.
26. Baldwin, W. Interferometer system for measuring straightness and roll. U.S. Patent. 3790284, 1974.
27. Yamauchi, M.; Matsuda, K. Interferometric straightness measurement system using a holographic grating. Opt. Eng 1994, 33, 1078-1083.
28. Zhang, J.; Cai, L. Interferometric straightness measurement system using triangular prism. Opt. Eng. 1998, 37, 1785-1789.
29. Donati, S.; Falzoni, L.; Merlo, S. A PC-interfaced, compact laser-diode feedback interferometer for displacement measurements. IEEE Trans. Instrum. Meas. 1996, 45, 942-947.