Five-degrees-of-freedom measurement system based on a monolithic prism and phasesensitive detection technique

Applied Optics

Volumn 52, Issue 26, 2013, Pages 6607-6615

  Huang, Pei ^a   Li, Yan ^a   Wei, Haoyun ^a   Ren, Libing ^a   Zhao, Shijie ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DEGREES OF FREEDOM (MECHANICS); INTERFEROMETERS; LASER INTERFEROMETRY; MACHINE COMPONENTS; MACHINE TOOLS; MECHANICS; OPTICAL SENSORS; PRISMS;

ELECTRONIC COMPONENT; INDUSTRIAL ENVIRONMENTS; LASER INTERFEROMETER; MEASUREMENT SYSTEM; PHASE SENSITIVE DETECTION; PIGTAILED LASER DIODE; POSITION-SENSITIVE DETECTORS; STRAIGHTNESS ERRORS;

ERRORS;

EID: 84884617635     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.52.006607     Document Type: Article

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