Introduction to silicon carbide (SIC) microelectromechanical systems (MEMS)

Silicon Carbide Micro Electromechanical Systems for Harsh Environments

Volumn , Issue , 2006, Pages 1-17

  Cheung, Rebecca ^a  

^a UNIVERSITY OF EDINBURGH   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL DEVICES; MEMS; MICROMECHANICS; SEMICONDUCTING SILICON; SEMICONDUCTOR MATERIALS; SILICON CARBIDE; SILICON IMPLANTS; WIDE BAND GAP SEMICONDUCTORS;

HARSH ENVIRONMENT; MEMS MATERIALS; MICRO ELECTROMECHANICAL SYSTEM (MEMS); RECENT RESEARCHES; SILICON CARBIDES (SIC); UNIVERSITY OF EDINBURGH;

SILICON COMPOUNDS;

EID: 84967546629     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1142/9781860949098_0001     Document Type: Chapter

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41. www.FLXMicro.com