The development of a "workstation" for optical testing and modification of IMEMS on a wafer

Proceedings of SPIE-The International Society for Optical Engineering

Volumn 4408, Issue , 2001, Pages 402-408

  Hedley, J ^a   Harris, A ^a   Burdess, J ^a   McNie, M ^a  

^a NEWCASTLE UNIVERSITY   (United Kingdom)

Author keywords

Ablation; Characterisation; Excitation; Optical; Trimming

Indexed keywords

ELECTRIC EXCITATION; ELECTROSTATIC ACTUATORS; INTEGRATED CIRCUIT TESTING; LASER ABLATION; NEODYMIUM LASERS; VIBRATION MEASUREMENT;

INTEGRATED MICROELECTROMECHANICAL SYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0034866979     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.425356     Document Type: Article

References (8)

1. Laser interferometry for measuring positions and vibrations
2. Heterodyne interferometers for vibration analysis
3. High-speed non contact profiler based on scanning white light interferometry
4. Micro-machining workstation for a diode pumped Nd:YAG high brightness laser system
5. Rapid prototyping of micromechanical devices using a Q-switched Nd:YAG laser with optional frequency doubling
6. Real-time determination of the amount of removed material during short pulses laser micromachining
7. The characteristics of point-heating excitation in silicon micromechanical resonators
8. Mechanisms of optical activation of micromechanical resonators