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Volumn 313-314, Issue , 1998, Pages 18-32

Advances in multichannel spectroscopic ellipsometry

(7) Collins, R W a An, Ilsin a Fujiwara, H a Lee, Joungchel a Lu, Yiwei a Koh, Joohyun a Rovira, P I a

a PENNSYLVANIA STATE UNIVERSITY (United States)

Author keywords

Amorphous semiconductors; Multichannel SE; Nanophase materials; Real time spectroscopic ellipsometry (SE); Rotating element SE; Solar cells; Thin film nucleation and growth

Indexed keywords

AMORPHOUS FILMS; FILM GROWTH; GRAIN SIZE AND SHAPE; INTERFACES (MATERIALS); NANOSTRUCTURED MATERIALS; NUCLEATION; SCANNING; SEMICONDUCTING FILMS; SOLAR CELLS; SPECTROSCOPY; SURFACE ROUGHNESS; THIN FILMS;

MULTICHANNEL SPECTROSCOPIC ELLIPSOMETRY;

ELLIPSOMETRY;

EID: 0032001178 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(97)00764-5 Document Type: Article

Times cited : (78)

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