Ellipsometric determination of optical constants for silicon and thermally grown silicon dioxide via a multi-sample, multi-wavelength, multi-angle investigation

Journal of Applied Physics

Volumn 83, Issue 6, 1998, Pages 3323-3336

  Herzinger, C M ^a   Johs, B ^a   McGahan, W A ^a,c   Woollam, J A ^a   Paulson, W ^b  

^a J A WOOLLAM CO INC   (United States)

^b MOTOROLA INC   (United States)

^c NANOMETRICS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000096595     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.367101     Document Type: Article

References (31)

1. D. E. Aspnes and A. A. Studna, Phys. Rev. B 27, 7466 (1983).
2. G. E. Jellison, Jr., Opt. Mater. 1, 41 (1992).
3. V. A. Yakovlev and E. A. Irene, J. Electrochem. Soc. 139, 1450 (1992);
4. V. A. Yakovlev, Q. Liu, and E. A. Irene, J. Vac. Sci. Technol. A 10, 427 (1992).
5. E. A. Irene, Thin Solid Films 233, 96 (1993).
6. N. V. Nguyen, D. Chandler-Horowitz, P. M. Amirtharaj, and J. G. Pellegrino, Appl. Phys. Lett. 64, 2688 (1994).
7. E. A. Taft and L. Cordes, J. Electrochem. Soc. 126, 131 (1979).
8. D. E. Aspnes and J. B. Theeten, Phys. Rev. Lett. 43, 1046 (1979);
9. J. Electrochem. Soc. 127, 1359 (1980).
10. R. M. A. Azzam and N. M. Bashara, in Ellipsometry and Polarized Light (North-Holland, New York, 1977), Chap. 4.
11. C. M. Herzinger, P. G. Snyder, B. Johs, and J. A. Woollam, J. Appl. Phys. 77, 1715 (1995).
12. W. H. Press, B. P. Flannery, S. A. Teukolsky, and W. T. Vetterling, in Numerical Recipes: The Art of Scientific Computing (Cambridge University Press, Cambridge MA, 1988), Chap. 14.
13. G. E. Jellison, Jr., Appl. Opt. 30, 3354 (1991).
14. P. G. Snyder, M. C. Rost, G. H. Bu-Abbud, and J. A. Woollam, J. Appl. Phys. 60, 3293 (1986).
15. W. A. McGahan, B. Johs, and J. A. Woollam, Thin Solid Films 234, 443 (1993).
16. H. R. Philipp, in Handbook of Optical Constants of Solids, edited by E. D. Palik (Academic, New York, 1985), p. 749.
17. B. Brixner, J. Opt. Soc. Am. 57, 674 (1967);
18. I. H. Malitson, J. Opt. Soc. Am. ibid. 55, 1205 (1965).
19. H. R. Philipp, Solid State Commun. 4, 73 (1966);
20. J. Phys. Chem. Solids 32, 1935 (1971).
21. D. E. Edwards, in Handbook of Optical Constants of Solids, edited by E. D. Palik (Academic, New York, 1985), p. 547.
22. R. Hulthèn, Phys. Ser. 12, 342 (1975).
23. G. G. McFarlane and V. Roberts, Phys. Rev. 98, 1965 (1955).
24. W. C. Dash and R. Newman, Phys. Rev. 99, 1151 (1955).
25. D. E. Aspnes, in Handbook of Optical Constants of Solids, edited by E. D. Palik (Academic, New York, 1985), Chap. 5, p. 104.
26. H. R. Philipp, in Handbook of Optical Constants of Solids, edited by E. D. Palik (Academic, New York, 1985), p. 765.
27. V. Nayar, W. Y. Leong, C. Pickering, A. J. Pidduck, R. T. Carline, and D. J. Robbins, Appl. Phys. Lett. 61, 1304 (1992).
28. T. Yasuda and D. E. Aspnes, Appl. Opt. 33, 7435 (1994).
29. C. M. Herzinger, B. Johs, and J. A. Woollam (unpublished).
30. C. M. Herzinger, H. Yao, P. G. Snyder, F. G. Celii, Y.-C. Kao, B. Johs, and J. A. Woollam, J. Appl. Phys. 77, 4677 (1995).
31. C. M. Herzinger, P. G. Snyder, F. G. Celii, Y.-C. Kao, D. Chow, B. Johs, and J. A. Woollam, J. Appl. Phys. 79, 2663 (1996).