Analytic representations of the dielectric functions of materials for device and structural modeling

Thin Solid Films

Volumn 313-314, Issue , 1998, Pages 132-136

  Leng, J ^a   Opsal, J ^a   Chu, H ^a   Senko, M ^a   Aspnes, D E ^b  

^a Therma Wave Inc   (United States)

^b Aspnes Associates Inc   (United States)

Author keywords

Amorphous Si; Analytic representations; Crystalline Si; Dielectric functions; Silicon nitride

Indexed keywords

AMORPHOUS SILICON; CRYSTALLINE MATERIALS; EIGENVALUES AND EIGENFUNCTIONS; MATHEMATICAL MODELS; SEMICONDUCTING SILICON COMPOUNDS; SILICON NITRIDE;

DIELECTRIC FUNCTIONS;

SEMICONDUCTING SILICON;

EID: 0031997432     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00799-2     Document Type: Article

References (14)

1. D.E. Aspnes, W.E. Quinn, M.C. Tamargo, et al., Appl. Phys. Lett. 60 (1992) 1244.
2. M. Cardona, Modulation Spectroscopy, Academic Press, New York, 1969.
3. H.W. Verleur, J. Opt. Soc. Am. 58 (1968) 1356.
4. B.G. Martin, R.F. Wallis, Solid State Commun. 21 (1977) 385.
5. M. Erman, J.B. Theeten, P. Chambon, S.M. Kelso, D.E. Aspnes, J. Appl. Phys. 56 (1984) 2664.
6. C.C. Kim, J.W. Garland, H. Abad, P.M. Raccah, Phys. Rev. B 45 (1992) 11749.
7. [7a] A.R. Forouhi, I. Bloomer, Phys. Rev. B 34 (1986a) 7018.
8. [7b] A.R. Forouhi, I. Bloomer, Phys. Rev. B 38 (1988b) 1865.
9. W.A. McGahan, T. Makovicka, J. Hale, J.A. Woollam, Thin Solid Films 253 (1994) 57.
10. [9a] G.E. Jellison, Jr., F.A. Modine, Appl. Phys. Lett. 69 (1996a) 371.
11. [9b] G.E. Jellison, Jr., F.A. Modine, Appl. Phys. Lett. 69 (1996b) 2137.
12. T. Yasuda, D.E. Aspnes, Appl. Opt. 33 (1994) 7435.
13. D.E. Aspnes, E. Kinsbron, A.A. Studna, Phys. Rev. B 29 (1984) 768.
14. H.R. Philipp, J. Electrochem. Soc. 120 (1973) 295.