Broadband spectral operation of a rotating-compensator ellipsometer

Thin Solid Films

Volumn 313-314, Issue , 1998, Pages 58-61

  Opsal, J ^a   Fanton, J ^a   Chen, J ^a   Leng, J ^a   Wei, L ^a   Uhrich, C ^a   Senko, M ^a   Zaiser, C ^a   Aspnes, D E ^b  

^a Therma Wave Inc   (United States)

^b Aspnes Associates Inc   (United States)

Author keywords

Crystalline Si; Least squares analysis; Pseudodielectric function; Rotating compensator ellipsometer (RCE)

Indexed keywords

CRYSTALLINE MATERIALS; LEAST SQUARES APPROXIMATIONS; OPTICAL ROTATION; SILICON;

ROTATING COMPENSATOR ELLIPSOMETER (RCE);

ELLIPSOMETRY;

EID: 17544402201     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00769-4     Document Type: Article

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