Rotating-compensator multichannel ellipsometry: Applications for real time Stokes vector spectroscopy of thin film growth

Review of Scientific Instruments

Volumn 69, Issue 4, 1998, Pages 1800-1810

  Lee, Joungchel ^a   Rovira, P I ^a   An, Ilsin ^a,b   Collins, R W ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

^b Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001286864     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1148844     Document Type: Article

References (34)

1. R. H. Muller and J. C. Farmer, Rev. Sci. Instrum. 55, 371 (1984).
2. Y.-T. Kim, R. W. Collins, and K. Vedam, Surf. Sci. 233, 341 (1990).
3. N. V. Nguyen, B. S. Pudliner, I. An, and R. W. Collins, J. Opt. Soc. Am. A 8, 919 (1991).
4. J. An and R. W. Collins, Rev. Sci. Instrum. 62, 1904 (1991).
5. I. An, Y. M. Li, H. V. Nguyen, and R. W. Collins, Rev. Sci. Instrum. 63, 3842 (1992).
6. Y. Talmi and R. W. Simpson, Appl. Opt. 19, 1401 (1980).
7. F. Ferrieu, F. Bernoud, O. Thomas, and J. L. Stehle, Mater. Res. Soc. Symp. Proc. 101, 403 (1988).
8. W. M. Duncan and S. A. Henck, Appl. Surf. Sci. 63, 9 (1993).
9. S. A. Henck, W. M. Duncan, L. M. Lowenstein, and S. W. Butler, J. Vac. Sci. Technol. A 11, 1179 (1993).
10. B. Drevillon, Prog. Cryst. Growth Charact. Mater. 27, 1 (1993).
11. J. Costa, J. Campmany, A. Canillas, J. L. Andujar, and E. Bertran, Rev. Sci. Instrum. 68, 3135 (1997).
12. P. S. Hauge, Surf. Sci. 96, 108 (1980).
13. R. W. Collins, Rev. Sci. Instrum. 61, 2029 (1990).
14. P. S. Hauge and F. H. Dill, Opt. Commun. 14, 431 (1975).
15. P. S. Hauge, Opt. Commun. 17, 74 (1976).
16. P. S. Hauge, Surf. Sci. 56, 148 (1976).
17. D. E. Aspnes, J. Opt. Soc. Am. 65, 1274 (1975).
18. D. E. Aspnes, Surf. Sci. 56, 161 (1976).
19. B. Hong, Ph.D. thesis, The Pennsylvania State University, University Park, PA, 1996.
20. D. E. Aspnes, J. Opt. Soc. Am. 64, 812 (1974).
21. J. M. M. de Nijs, A. H. M. Holtslag, A. Hoeksta, and A. van Silfhout, J. Opt. Soc. Am. A 5, 1466 (1988).
22. J. M. Bennett and H. E. Bennett, in Handbook of Optics, edited by W. G. Driscoll and W. Vaughan (McGraw-Hill, New York, 1978), p. 10-1.
23. R. A. Yarussi, A. R. Heyd, H. V. Nguyen, and R. W. Collins, J. Opt. Soc. Am. A 11, 2320 (1994).
24. D. E. Aspnes and A. A. Studna, Phys. Rev. B 27, 985 (1983).
25. I. H. Malitson, J. Opt. Soc. Am. 55, 1205 (1965).
26. B. Hong, M. Wakagi, W. Drawl, R. Messier, and R. W. Collins, Phys. Rev. Lett. 75, 1122 (1995).
27. B. Hong, J. Lee, R. W. Collins, Y. Kuang, T. T. Tsong, W. Drawl, R. Messier, and Y. E. Strausser, Diamond Relat. Mater. 6, 55 (1997).
28. M. Wakagi, B. Hong, H. V. Nguyen, R. W. Collins, W. Drawl, and R. Messier, J. Vac. Sci. Technol. A 13, 1917 (1995).
29. J. Lee, B. Hong, R. Messier, and R. W. Collins, J. Appl. Phys. 80, 6489 (1996).
30. G. E. Jellison, Jr. and J. W. McCamy, Appl. Phys. Lett. 61, 512 (1992).
31. N. Blayo, R. A. Cirelli, F. P. Klemens, and J. T. C. Lee, J. Opt. Soc. Am. A 12, 591 (1995).
32. H. L. Maynard, N. Layadi, and J. T. C. Lee, J. Vac. Sci. Technol. B 15, 109 (1997).
33. Y. H. Yang and J. R. Abelson, J. Vac. Sci. Technol. A 13, 1145 (1995).
34. J. Opsal, J. Fanton, J. Chen, J. Leng, L. Wei, C. Uhrich, M. Senko, C. Zaiser, and D. E. Aspnes, in Proceedings of the Second International Conference on Spectroscopic Ellipsometry, edited by R. W. Collins, D. E. Aspnes, and E. A. Irene (Elsevier, New York, 1998) (in press).