Spectroscopic ellipsometry measurements of AlxGa1-xN in the energy range 3-25 eV

Thin Solid Films

Volumn 313-314, Issue , 1998, Pages 745-750

  Wethkamp, T ^a   Wilmers, K ^a   Esser, N ^a   Richter, W ^a   Ambacher, O ^b   Angerer, H ^b   Jungk, G ^c   Johnson, R L ^d   Cardona, M ^a  

^a TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

^b WALTER SCHOTTKY INSTITUT   (Germany)

^c PAUL DRUDE INSTITUT FÜR FESTKÖRPERELEKTRONIK   (Germany)

^d UNIVERSITY OF HAMBURG   (Germany)

Author keywords

AlGaN; Aluminum nitride; Ellipsometry; Gallium nitride; Optical properties; Vacuum ultraviolet

Indexed keywords

ELECTRON TRANSITIONS; ELLIPSOMETRY; FILM GROWTH; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MOLECULAR BEAM EPITAXY; MORPHOLOGY; NITRIDES; OPTICAL PROPERTIES; SEMICONDUCTING GALLIUM COMPOUNDS; SYNCHROTRON RADIATION; ULTRAVIOLET SPECTROSCOPY;

ALUMINUM GALLIUM NITRIDE; ALUMINUM NITRIDE; GALLIUM NITRIDE; SPECTROSCOPIC ELLIPSOMETRY;

SEMICONDUCTING ALUMINUM COMPOUNDS;

EID: 0031998227     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00990-5     Document Type: Article

References (20)

1. H. Morkoc, S. Strite, G.B. Gao, M.E. Lin, B. Sverdlov, M. Burns, J. Appl. Phys. 76 (1994) 1363.
2. S. Yoshida, S. Misawa, S. Gonda, J. Appl. Phys 53 (1982) 6844.
3. D. Brunner, H. Angerer, E. Bustarret, F. Freudenberg, R. Höpler, R. Dimitrov, O. Ambacher, M. Stutzmann, J. Appl. Phys. 82 (1997) 5090.
4. M.D. Bremser, W.G. Perry, T. Zheleva, et al., MRS Internet J. Nitride Semiconductor Res. 1 (1996) 8.
5. S. Logothetidis, J. Petalas, M. Cardona, T.D. Moustakas, Phys. Rev. B 50 (1994) 18017.
6. R.L. Johnson, J. Barth, M. Cardona, D. Fuchs, A.M. Bradshaw, Rev. Sci. Instrum. 60 (1989) 2209.
7. J. Barth, R.L. Johnson, M. Cardona, in: E. Palik (Ed.), Handbook of Optical Constants of Solids II, Academic Press, 1991.
8. D.E. Aspnes, et al., J. Appl. Phys. 60 (1986) 757.
9. H. Angerer, O. Ambacher, R. Dimitrov, T. Metzger, W. Rieger, M. Stutzmann, MRS Internet J. Nitride Semiconductor Res. 1 (1996) 15.
10. T. Metzger, R. Höpler, E. Born, O. Ambacher, M. Stutzmann, T.H. Metzger, R. Stoemmer, M. Schuster, H. Göbel, S. Christiansen, M. Albrecht, H.P. Strunk, submitted to Phil. Mag. A
11. G. Dollinger, S. Faustermann, P. Maier-Komor, Nucl. Instr. Meth. Phys. Res. B 64 (1992) 422.
12. T. Metzger, H. Angerer, O. Ambacher, M. Stutzmann, E. Born, Phys. Stat. Sol. B 193 (1996) 391.
13. J.-T. Zettler, T. Wethkamp, M. Zorn, et al., Appl. Phys. Lett. 67 (1995) 3783.
14. D.E. Aspne, J. Opt. Soc. Am. 70 (1980) 1275.
15. K. Miwa, A. Fukumoto, Phys. Rev. B 48 (1993) 7897.
16. N.E. Christensen, I. Gorczyca, Phys. Rev. B 50 (1994) 4397.
17. C.G. Olson, D.W. Lynch, Phys. Rev. B 24 (1981) 4629.
18. N.V. Edwards, M.D. Bremser, T.W. Weeks, et al., Mat. Res. Soc. Symp. Proc., 395 (1996) 405.
19. M. Cardona, Phys. Res. 129 (1963) 1068.
20. M. Cardona, Modulation Spectroscopy, Academic Press, 1969.