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Thin Solid Films

Volumn 313-314, Issue , 1998, Pages 33-39

Spectroscopic ellipsometry data analysis: Measured versus calculated quantities

(1) Jellison Jr , G E a

a OAK RIDGE NATIONAL LABORATORY (United States)

Author keywords

Anisotropic materials; Depolarization; Ellipsometry calculations; Generalized ellipsometry; Mueller matrices; Parameterization of optical functions

Indexed keywords

ANISOTROPY; DATA REDUCTION; LIGHT POLARIZATION; MATRIX ALGEBRA; SPECTROMETRY; THIN FILMS;

JONES MATRICES; MUELLER MATRICES; OPTICAL FUNCTION PARAMETRIZATION;

ELLIPSOMETRY;

EID: 0031998601 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/s0040-6090(97)00765-7 Document Type: Article

Times cited : (345)

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