Evidence of Negative Capacitance in Piezoelectric ZnO Thin Films Sputtered on Interdigital Electrodes

ACS Applied Materials and Interfaces

Volumn 7, Issue 44, 2015, Pages 24470-24479

  Laurenti, Marco ^a   Verna, Alessio ^a,b   Chiolerio, Alessandro ^a  

^a ISTITUTO ITALIANO DI TECNOLOGIA   (Italy)

^b POLITECNICO DI TORINO   (Italy)

Author keywords

electrical properties; negative capacitance; sputtering; thin films; zinc oxide

Indexed keywords

CAPACITANCE; DOMESTIC APPLIANCES; ELECTRIC FIELD EFFECTS; ELECTRIC LOSSES; ELECTRIC PROPERTIES; ELECTRODES; ELECTRONIC EQUIPMENT; FIELD EFFECT TRANSISTORS; GOLD; INTERFACE STATES; INTERFACES (MATERIALS); METAL WORKING; METALLIC FILMS; OPTICAL FILMS; OXIDE FILMS; OXYGEN VACANCIES; PIEZOELECTRICITY; SPUTTERING; THERMOELECTRIC EQUIPMENT; ZINC OXIDE;

CHEMICAL COMPOSITIONS; DEVICE ARCHITECTURES; ELECTRICAL MEASUREMENT; ELECTRONIC ENVIRONMENTS; INTERDIGITAL ELECTRODE; MINIATURIZED ELECTRONICS; NEGATIVE CAPACITANCE; SURFACE NANOSTRUCTURE;

THIN FILMS;

EID: 84946924543     PISSN: 19448244     EISSN: 19448252     Source Type: Journal    
DOI: 10.1021/acsami.5b05336     Document Type: Article

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