Evaluation of the piezoelectric properties and voltage generation of flexible zinc oxide thin films

Nanotechnology

Volumn 26, Issue 21, 2015, Pages

  Laurenti, M ^a,b   Stassi, S ^b   Lorenzoni, M ^a,c   Fontana, M ^a,b   Canavese, G ^a,b   Cauda, V ^a   Pirri, C F ^a,b  

^a ISTITUTO ITALIANO DI TECNOLOGIA   (Italy)

^b POLITECNICO DI TORINO   (Italy)

^c INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

flexible; piezoelectricity; sputtering; Zinc oxide

Indexed keywords

COPPER; CRYSTAL ORIENTATION; CRYSTALLOGRAPHY; FILMS; GRAIN BOUNDARIES; GRAIN SIZE AND SHAPE; MAGNETRON SPUTTERING; METALLIC FILMS; OPTICAL FILMS; PIEZOELECTRICITY; SCANNING PROBE MICROSCOPY; SPUTTERING; SUBSTRATES; SURFACE ROUGHNESS; THIN FILMS; ZINC; ZINC OXIDE;

CRYSTALLINE STRUCTURE; FLEXIBLE; MECHANICAL DEFORMATION; PIEZOELECTRIC PROPERTY; PIEZORESPONSE FORCE MICROSCOPY; PREFERENTIAL ORIENTATION; RADIO FREQUENCY MAGNETRON SPUTTERING; ZINC OXIDE THIN FILMS;

OXIDE FILMS;

EID: 84929484523     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/26/21/215704     Document Type: Article

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