Pyrolysis of Alucone Molecular Layer Deposition Films Studied Using in Situ Transmission Fourier Transform Infrared Spectroscopy

Journal of Physical Chemistry C

Volumn 119, Issue 26, 2015, Pages 14603-14612

  Dumont, Jaime W ^a   George, Steven M ^a,b  

^a UNIVERSITY OF COLORADO   (United States)

^b UCB 450   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ATOMIC LAYER DEPOSITION; CARBON FILMS; CARBOXYLATION; DEPOSITION; ETHYLENE; ETHYLENE GLYCOL; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; IN SITU PROCESSING; INTERFACES (MATERIALS); PYROLYSIS; SELF ASSEMBLY; STRETCHING; TRANSMISSION ELECTRON MICROSCOPY;

DRUDE-ZENER THEORY; ELECTRICAL CONDUCTANCE; IN-SITU TRANSMISSION; INFRARED ABSORBANCE; MOLECULAR LAYER DEPOSITION; MOLECULAR LAYER DEPOSITIONS (MLD); PYROLYSIS TEMPERATURE; TRANSMISSION ELECTRON MICROSCOPY IMAGES;

COMPOSITE FILMS;

EID: 84933063824     PISSN: 19327447     EISSN: 19327455     Source Type: Journal    
DOI: 10.1021/jp512074n     Document Type: Article

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