Molecular layer deposition of hybrid organic - Inorganic alucone polymer films using a three-step abc reaction sequence

Chemistry of Materials

Volumn 21, Issue 22, 2009, Pages 5365-5374

  Yoon, Byunghoon ^a   Seghete, Dragos ^a   Cavanagh, Andrew S ^a   George, Steven M ^a,b  

^a UNIVERSITY OF COLORADO   (United States)

^b UCB 450   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORBANCES; APPROXIMATE FORMULAS; ETHANOLAMINES; FOURIER TRANSFORM INFRARED; FTIR; GROWTH PER CYCLE; IN-SITU; MOLECULAR LAYER DEPOSITION; ORGANIC INORGANIC POLYMERS; ORGANIC PRECURSOR; ORGANIC REACTANTS; ORGANIC-INORGANIC; REACTION MECHANISM; REACTION SEQUENCES; RING OPENING; SI WAFER; SURFACE SPECIES; TEMPERATURE DEPENDENT; TRANSMISSION ELECTRON MICROSCOPE; TRIMETHYLALUMINUM; X RAY REFLECTIVITY;

APPROXIMATION ALGORITHMS; ATOMIC LAYER DEPOSITION; DEPOSITION; ELECTRON MICROSCOPES; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INORGANIC POLYMERS; MALEIC ANHYDRIDE; PLASTIC FILMS; POLYMER FILMS; SELF ASSEMBLY; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SURFACE REACTIONS; THERMOANALYSIS; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

FILM GROWTH;

EID: 72149117683     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm9013267     Document Type: Article

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