Stability and annealing of alucones and alucone alloys

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 31, Issue 1, 2013, Pages

  Ghazaryan, Lilit ^a   Kley, Ernst Bernhard ^a   Tünnermann, Andreas ^a   Viorica Szeghalmi, Adriana ^a  

^a FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPACT LAYER; DENSE FILMS; DRY AIR; EFFECTIVE REFRACTIVE INDEX; GAS SEPARATIONS; LOW INDEX; MOLECULAR LAYER DEPOSITION; NANO-POROUS; ORGANIC-INORGANIC; SLOW THERMAL ANNEALING; THERMAL-ANNEALING; THICKNESS LOSS; TRIMETHYLALUMINUM;

ALLOYS; ANNEALING; ATOMIC LAYER DEPOSITION; DEPOSITS; ETHYLENE GLYCOL; FUNCTIONAL MATERIALS; GAS PERMEABLE MEMBRANES; OPTICAL COATINGS; REFRACTIVE INDEX;

CERIUM ALLOYS;

EID: 84871873863     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.4773296     Document Type: Article

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