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Microporous and Mesoporous Materials

Volumn 168, Issue , 2013, Pages 178-182

Ultrathin highly porous alumina films prepared by alucone ABC molecular layer deposition (MLD)

(6) Liang, Xinhua a,d Evanko, Brian W a Izar, Alan a King, David M b Jiang, Ying Bing c Weimer, Alan W a

a University of Colorado at Boulder (United States)

b ALD NanoSolutions Inc (United States)

c UNIVERSITY OF NEW MEXICO (United States)

d University of Missouri Rolla (United States)

Author keywords

Aluminum oxide; Fluidized bed reactor; Molecular layer deposition (MLD); Porous film; Ultra thin

Indexed keywords

ALUMINA; ALUMINUM; ALUMINUM COATINGS; ATOMIC LAYER DEPOSITION; BIOLOGICAL MATERIALS; CARBON FILMS; CHAINS; CHEMICAL REACTORS; DEPOSITION; FLUID CATALYTIC CRACKING; FLUIDIZED BEDS; NANOPORES; POLYMER FILMS; PORE SIZE; SELF ASSEMBLY; SEMICONDUCTING FILMS; ULTRATHIN FILMS;

ALUMINUM OXIDES; FLUIDIZED BED REACTORS; MOLECULAR LAYER DEPOSITIONS (MLD); POROUS FILM; ULTRA-THIN;

THIN FILMS;

EID: 84868467994 PISSN: 13871811 EISSN: None Source Type: Journal
DOI: 10.1016/j.micromeso.2012.09.035 Document Type: Article

Times cited : (40)

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